Laser evaporation multi-cavity metal/carbon nanometer powder continuous production method
A technology of laser evaporation and carbon nanopowder, which is applied in the direction of carbon nanotubes, nanocarbons, non-metallic elements, etc., can solve the problems of continuous feeding and supply, large energy consumption, cost increase, etc., and reduce the time of vacuuming , Improve production efficiency and reduce production cost
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Embodiment 1
[0047] The continuous production method of laser evaporation multi-cavity metal nanopowder comprises the following steps:
[0048](1) Place the target: Install a single metal target with the same composition on the target holder of each independent cavity as the anode, and use a metal with a melting point higher than 3000°C as the cathode, and place it on the inner wall of the cavity above the target Gallium arsenide glass with a thickness of 3mm is sealed and installed at the opening, and the gallium arsenide glass is cooled;
[0049] (2) Vacuuming: Close the hatches of each independent cavity, open the vacuum valves of each independent cavity, and use a mechanical pump to vacuumize all the cavities for no more than 10 -1 Pa, and then use the molecular pump to vacuum not higher than 10 -4 Pa, close the vacuum valves of each independent cavity;
[0050] (3) Filling with working gas: open the intake valves of each independent cavity, and feed the mixed gas of argon and hydrog...
Embodiment 2
[0058] The continuous production method of laser evaporation multi-cavity metal nanopowder comprises the following steps:
[0059] (1) Place the target: install metal alloy targets of different compositions on the target holders of each independent cavity as the anode, and use a metal with a melting point higher than 3000°C as the cathode, and place it on the inner wall of the cavity above the target Gallium arsenide glass with a thickness of 4mm is sealed and installed at the opening, and the gallium arsenide glass is cooled;
[0060] (2) Vacuuming: Close the hatches of each independent cavity, open the vacuum valves of each independent cavity, and use a mechanical pump to vacuumize all the cavities for no more than 10 -1 Pa, and then use the molecular pump to vacuum not higher than 10 -4 Pa, close the vacuum valves of each independent cavity;
[0061] (3) Filling with working gas: open the intake valves of each independent cavity, and feed the mixed gas of argon and hydrog...
Embodiment 3
[0069] The continuous production method of laser evaporation multi-cavity metal nanopowder comprises the following steps:
[0070] (1) Place the target: install a single metal target of different composition on the target holder of each independent cavity as the anode, and use a metal with a melting point higher than 3000°C as the cathode, and place it on the inner wall of the cavity above the target The opening is sealed with gallium arsenide glass with a thickness of 5mm, and the gallium arsenide glass is cooled;
[0071] (2) Vacuuming: Close the hatches of each independent cavity, open the vacuum valves of each independent cavity, and use a mechanical pump to vacuumize all the cavities for no more than 10 -1 Pa, and then use the molecular pump to vacuum not higher than 10 -4 Pa, close the vacuum valves of each independent cavity;
[0072] (3) Filling with working gas: open the intake valves of each independent cavity, and feed the mixed gas of argon and hydrogen as the wo...
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