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Acoustic vector sensor and production method thereof

A technology of vector sensor and manufacturing method, which is applied to instruments, measuring devices, and measuring ultrasonic/sonic/infrasonic waves, etc., and can solve problems such as the difficulty of miniaturization of acoustic sensors

Inactive Publication Date: 2019-05-14
南京粒子声学科技有限公司
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Problems solved by technology

[0005] The purpose of the present invention is to provide an acoustic vector sensor and its manufacturing method to solve the problem that the miniaturization of the acoustic sensor is difficult.

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  • Acoustic vector sensor and production method thereof
  • Acoustic vector sensor and production method thereof
  • Acoustic vector sensor and production method thereof

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Embodiment Construction

[0047] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments.

[0048] Traditional sound pressure microphones mainly rely on the diaphragm to convert sound waves into mechanical vibrations, and then convert the mechanical vibrations of the diaphragm into electrical signals. Different from the transducing microphone, the acoustic particle vibration velocity sensor uses the disturbance of the sound wave to the thermal field for sensing. For the detection of sound, the embodiment of the present invention provides a novel acoustic vector sensor for measuring the vibration velocity of sound particle, and the acoustic...

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Abstract

The invention provides an acoustic vector sensor and a production method thereof and relates to the field of an acoustic sensor. The acoustic vector sensor comprises a base plate, wherein a groove isformed on the base plate; a pair of sensing bands which are set at two sides of the groove in a spanning mode and are set on the base plate, wherein the pair of sensing bands comprise bearing insulating parts and graphene film; and a first electrode, a second electrode and a third electrode which are set on the base plate. When a current is applied to the graphene film through utilization of the electrodes, heat is generated, temperature is changed resulting from the fact that air around the graphene film is disturbed due to an acoustic wave, further a resistance value of the graphene film ischanged, and through detection of the change of the resistance value, acoustic particle vibration speed can be measured, so the acoustic wave is detected. A structure of the acoustic vector sensor canbe prepared by a method compatible with a micro-electro-mechanical system technology. The structure also can be miniaturized.

Description

technical field [0001] The invention relates to the field of acoustic sensors, in particular to an acoustic vector sensor and a manufacturing method thereof. Background technique [0002] Since Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System) technology is compatible with conventional semiconductor manufacturing technology, MEMS technology has developed rapidly. MEMS has many advantages such as miniaturization, intelligence, high integration, multi-function and suitable for mass production, and various electronic devices based on MEMS have been widely studied and paid attention to. [0003] Sound is the particle vibration propagation of the air medium, and the characteristics of the sound field can be described by sound pressure, sound particle velocity and acoustic impedance. Traditional acoustic sensors usually sense sound by measuring sound pressure, and usually require a diaphragm device to measure sound pressure structurally. [0004] However, t...

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Application Information

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IPC IPC(8): G01H11/06
Inventor 孙娜许相园鲍明卢明辉
Owner 南京粒子声学科技有限公司
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