A gas dielectric barrier discharge plasma generating device

Abstract

The invention discloses a gas insulated dielectric barrier discharge device, comprising a power supply module, a discharge spacing adjuster, a discharge cavity, a high voltage electrode, a ground electrode, a gas flow device and a gas supply module. A gas inlet and a gas outlet are formed in the discharge cavity. The high voltage electrode and the ground electrode are arranged in the discharge cavity, the high voltage electrode is connected with the discharge spacing adjuster and the power supply module, and the electrode gap is adjusted by adjusting the discharge spacing adjuster. According to the gas insulated dielectric barrier discharge device disclosed by the invention, the conventional dielectric barrier discharge solid medium is removed and is replaced by a gas insulating layer. Thegas insulating layer is guided and regulated by the gas flow device. The gas flow device penetrates into the interior of the cavity, an insulating gas and a working gas are introduced in parallel along the electrode surface, wherein the breakdown voltage of the insulating gas is higher than the breakdown voltage of the working gas. The gas insulated dielectric barrier discharge device disclosed by the invention creates a novel gas insulated dielectric barrier discharge form, avoids the influence of surface charge accumulation of the solid medium, and can be applied to the fields of plasma ignition combustion assistance and multilayer gas dielectric breakdown, etc.

Description

technical field [0001] The invention belongs to the technical field of gas discharge and discharge plasma, and in particular relates to a device for generating gas dielectric barrier discharge plasma. Background technique [0002] Plasma is the fourth state of matter, which is composed of a large number of positive and negative charged particles and neutral particles, and exhibits collective behavior as a neutral aggregate. According to the degree of ionization, it can be divided into thermal equilibrium plasma and low temperature plasma. [0003] Dielectric Barrier Discharge (DBD, Dielectric Barrier Discharge) is the main means of generating low-temperature plasma in industry. It can conveniently generate a large area of ​​low-temperature plasma at atmospheric pressure or higher than atmospheric pressure, and can obtain active particles required for chemical reactions at a lower temperature without vacuum equipment. In the past century of research, DBD is widely used in s...

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Problems solved by technology

The device uses solid dielectric materials, but its disadvantages are that the flat plate electrodes will cause uneven electric field distribution due to the edge effect, and the electrode distance cannot be adjusted. The problem of uneven distribution, the device is only suitable for solid dielectric barrier discharge

However, the device uses solid dielectric materials, which are not suitable for gas-insulated discharges, and the gas gap distance cannot be adjusted continuously, which requires high power supply

[0010] In the above-mentioned background technology, the low-temperature plasma device uses solid material as the medium, and there is complex surface charge interference; most of the devices are in an open environment, and the ambient gas cannot be set

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