A wide temperature thin film energy storage capacitor modified by rare earth elements and its preparation method
A technology of energy storage capacitors and rare earth elements, applied in the direction of thin film/thick film capacitors, capacitors, fixed capacitors, etc.
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Embodiment 1
[0044] (1) Preparation of BaHf 0.17 Ti 0.83 o 3 Ceramic target: according to BaHf 0.17 Ti 0.83 o 3 The stoichiometric ratio weighs 4-5N level BaTiO 3 High purity powder and HfO 2 High-purity powder, after the two are mixed evenly, the mixture is sequentially subjected to ball milling, pre-sintering, secondary ball milling, granulation, molding and sintering processes to obtain flaky BaHf 0.17 Ti 0.83 o 3 Ceramic target. The process parameters of ball milling and secondary ball milling are the same, specifically: the mass ratio of ball stone, mixture and alcohol is 2:1:1, the ball milling speed is 400r / min, and the ball milling time is 6h; the pre-sintering temperature is 900°C, The sintering time is 4h; a tablet press is used for molding, the pressure during the molding process is 40Mpa, and the holding time is 5min; the sintering temperature in the sintering process is 1050°C, and the sintering time is 4h.
[0045] (2) Clean substrate: Conductive single crystal SrTi...
Embodiment 2
[0058] (1) Preparation of BaHf 0.17 Ti 0.83 o 3 Ceramic target: according to BaHf 0.17 Ti 0.83 o 3 The stoichiometric ratio weighs 4-5N level BaTiO 3 High purity powder and HfO 2 High-purity powder, after the two are mixed evenly, the mixture is sequentially subjected to ball milling, pre-sintering, secondary ball milling, granulation, molding and sintering processes to obtain flake-shaped BaHf 0.17 Ti 0.83 o 3 Ceramic target. The process parameters of ball milling and secondary ball milling are the same, specifically: the mass ratio of ball stones, mixture and alcohol is 2:1:1, the ball milling speed is 380r / min, and the ball milling time is 5h; the pre-sintering temperature is 855°C, The sintering time is 3h; a tablet press is used for molding, the pressure during the molding process is 38Mpa, and the holding time is 4min; the sintering temperature in the sintering process is 1000°C, and the sintering time is 3h.
[0059] (2) Clean substrate: Conductive single crys...
Embodiment 3
[0065] (1) Preparation of BaHf 0.17 Ti 0.83 o 3 Ceramic target: according to BaHf 0.17 Ti 0.83 o 3 The stoichiometric ratio weighs 4-5N level BaTiO 3 High purity powder and HfO 2 High-purity powder, after the two are mixed evenly, the mixture is sequentially subjected to ball milling, pre-sintering, secondary ball milling, granulation, molding and sintering processes to obtain flaky BaHf 0.17 Ti 0.83 o 3 Ceramic target. The process parameters of ball milling and secondary ball milling are the same, specifically: the mass ratio of ball stone, mixture and alcohol is 2:1:1, the ball milling speed is 420r / min, and the ball milling time is 7h; the pre-sintering temperature is 945°C, The sintering time is 4h; a tablet press is used for molding, the pressure during the molding process is 40Mpa, and the holding time is 5min; the sintering temperature in the sintering process is 1100°C, and the sintering time is 5h.
[0066] (2) Clean substrate: Conductive single crystal SrTi...
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