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A method for manufacturing a thin film thermocouple for measuring a local temperature of a fuel cell

A local temperature and fuel cell technology, applied in fuel cell heat exchange, fuel cells, fuel cell additives, etc., can solve the problems of low metal mask processing accuracy and limited spatial resolution of temperature measurement, etc.

Inactive Publication Date: 2019-01-15
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, this method uses a metal mask to pattern the metal electrodes. Since the processing accuracy of the metal mask is not high, the thermocouple junction size obtained by this method is 0.6 mm × 1.0 mm, and the spatial resolution of temperature measurement is limited. limit

Method used

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  • A method for manufacturing a thin film thermocouple for measuring a local temperature of a fuel cell
  • A method for manufacturing a thin film thermocouple for measuring a local temperature of a fuel cell
  • A method for manufacturing a thin film thermocouple for measuring a local temperature of a fuel cell

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0136] 1 cleaning silicon wafer

[0137] Clean the silicon wafer with piranha washing solution (H2SO4:H2O2=3:1) to remove organic impurities on the surface of the silicon wafer. Remove the wafer from the piranha solution and rinse the wafer with deionized water. Use a CDA air gun to dry the water on the surface of the silicon wafer.

[0138] 2 Plating sacrificial layer

[0139] Put the silicon wafer on the electric heating plate and heat it for 5 minutes, and set the temperature of the electric heating plate to 100 degrees Celsius to dry the moisture on the surface of the silicon wafer. Leave the silicon wafer at room temperature and wait for the temperature of the silicon wafer to drop to room temperature. Use an evaporation machine or a magnetron sputtering system to coat a layer of aluminum on the silicon wafer, and the thickness of the aluminum is about 80 nanometers. Aluminum serves as a sacrificial layer for finally peeling off the thin-film thermocouple 6 .

[0140...

Embodiment 2

[0153] 1 cleaning silicon wafer

[0154] Clean the silicon wafer with piranha washing solution (H2SO4:H2O2=3:1) to remove organic impurities on the surface of the silicon wafer. Remove the wafer from the piranha solution and rinse the wafer with deionized water. Use a CDA air gun to dry the water on the surface of the silicon wafer.

[0155] 2 Plating sacrificial layer

[0156] Put the silicon wafer on the electric heating plate and heat it for 15 minutes. The temperature of the electric heating plate is set at 120 degrees Celsius to dry the moisture on the surface of the silicon wafer. Leave the silicon wafer at room temperature and wait for the temperature of the silicon wafer to drop to room temperature. Use an evaporation machine or a magnetron sputtering system to coat a layer of aluminum on the silicon wafer, and the thickness of the aluminum is about 140 nanometers. Aluminum serves as a sacrificial layer for finally peeling off the thin-film thermocouple 6 .

[015...

Embodiment 3

[0170] 1 cleaning silicon wafer

[0171] Clean the silicon wafer with piranha washing solution (H2SO4:H2O2=3:1) to remove organic impurities on the surface of the silicon wafer. Remove the wafer from the piranha solution and rinse the wafer with deionized water. Use a CDA air gun to dry the water on the surface of the silicon wafer.

[0172] 2 Plating sacrificial layer

[0173] Put the silicon wafer on the electric heating plate and heat it for 30 minutes, and the temperature of the electric heating plate is set at 150 degrees Celsius to dry the moisture on the surface of the silicon wafer. Leave the silicon wafer at room temperature and wait for the temperature of the silicon wafer to drop to room temperature. Use an evaporation machine or a magnetron sputtering system to coat a layer of aluminum on the silicon wafer, and the thickness of the aluminum is about 200 nanometers. Aluminum serves as a sacrificial layer for finally peeling off the thin-film thermocouple 6 .

...

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Abstract

A method for manufacturing a thin film thermocouple for measuring local temperature of a fuel cell comprise plating a sacrificial layer on a silicon wafer; A layer of Parylene film is deposited on thesacrificial layer as the lower protective layer of the thin film thermocouple. The photoresist is spin-coated on the Parylene film for patterning, then a layer of copper-nickel alloy is plated, and the excess copper-nickel alloy is removed to obtain the patterned copper-nickel electrode; Spin-coating photoresist on Parylene film for patterning, then plating a layer of copper, removing excess copper to obtain patterned copper electrode; A layer of Parylene film is deposited on the copper-nickel electrode and the copper electrode as the upper protective layer of the thin film thermocouple. Spin-coating photoresist on Parylene film for patterning, then plating a layer of aluminum, removing excess aluminum to obtain patterned hard mask, then etching Parylene film, exposing electrode pins andetching through holes on the film; The sacrificial layer is dissolved and the thin film is peeled off from the silicon wafer to obtain a thin film thermocouple. The thin film thermocouple manufacturedby the invention has the advantages of thin thickness and small temperature measuring point size.

Description

technical field [0001] The invention belongs to the technical field of fuel cell temperature measurement, and in particular relates to a method for manufacturing a thin-film thermocouple for measuring the local temperature of a fuel cell. Background technique [0002] The proton exchange membrane fuel cell is a new type of energy conversion device, which can directly convert the chemical energy in the fuel into electrical energy through an electrochemical reaction, and has the advantages of high energy conversion efficiency, no pollution, and low operating temperature. attention from all over the world. The structure of the proton exchange membrane fuel cell includes: cathode and anode flow field plate, sealing gasket, diffusion layer, catalytic layer and proton exchange membrane. The diffusion layer is generally carbon paper or carbon cloth, and the catalytic layer is platinum / carbon particles. The fuel of the proton exchange membrane fuel cell is hydrogen, and the oxidan...

Claims

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Application Information

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IPC IPC(8): H01L35/34H01M8/04007G01K7/02
CPCH01M8/04067G01K7/02H10N10/01Y02P70/50Y02E60/50
Inventor 丁靖唐于晴蔡赛杰屈治国陶文铨
Owner XI AN JIAOTONG UNIV
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