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Preparation method and system of molybdenum disulfide (MoS2) nanodot array based on flexible substrate

A nano-dot array, flexible substrate technology, applied in molybdenum sulfide, nanotechnology, ion implantation plating, etc., can solve the problems of high preparation cost, low yield, and difficulty in applying nano-dots to flexible devices, and achieve the quality of finished products. high effect

Inactive Publication Date: 2018-11-30
SHANGHAI UNIV
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Problems solved by technology

[0004] However, the above method for preparing nano-lattice has the following disadvantages: the preparation cost is high, the preparation process requires the application of metal precursors, the catalyst used in the preparation process pollutes the environment, the preparation conditions are harsh, the process control is difficult, the final yield is not high, and the final The prepared nano lattice is difficult to apply to flexible devices

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  • Preparation method and system of molybdenum disulfide (MoS2) nanodot array based on flexible substrate

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[0043] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0044] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0045] figure 1 MoS based on flexible substrate for the embodiment of the present invention 2 Flowchart of the preparation method of nanodot arrays. like figure 1 As shown, a MoS based on a flexible substrate ...

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Abstract

The invention discloses a preparation method and system of a molybdenum disulfide (MoS2) nanodot array based on a flexible substrate. The preparation method includes: cleaning the flexible substrate sputtered with an indium tin oxide film to obtain a clean substrate; drying the clean substrate to obtain a dry substrate; placing the dry and clean flexible substrate and MoS2 powder in a vacuum evaporator, heating and sublimating the MoS2 powder to condense the MoS2 powder on the dry and clean flexible substrate to obtain the MoS2 nanodot array. The preparation method or system of the MoS2 nano-dot array based on the flexible substrate directly uses the high vacuum evaporator to heat and evaporate the MoS2 powder onto the flexible substrate. A series of nano-dot arrays with controllable sizesand quantities can be prepared, and the finished product has high quality, and can be directly applied to the preparation of other flexible devices.

Description

technical field [0001] The invention relates to the field of nano-dot array preparation, in particular to a method and system for preparing a molybdenum disulfide nano-dot array based on a flexible substrate. Background technique [0002] In recent years, nanomaterials have been recognized by the world as new materials in the 21st century, and their research, preparation and application have become one of the most active scientific research fields today. Nanomaterials refer to materials with at least one dimension in the nanoscale range in three-dimensional space or materials composed of them as basic units. Nanomaterials can be divided into three categories according to the number of dimensions: (1) zero-dimensional, which refers to materials with three-dimensional dimensions in the nanoscale range, such as nanoparticles, atomic clusters, and quantum dots; (2) one-dimensional, which refers to materials with three-dimensional dimensions. Two-dimensional materials in the nan...

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Application Information

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IPC IPC(8): C23C14/06C23C14/24C01G39/06B82Y40/00
CPCC23C14/0623B82Y40/00C01G39/06C23C14/24
Inventor 陈果凌志天赵艺张鹏鹏魏斌
Owner SHANGHAI UNIV
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