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Preparation method of flexible display screen and composite substrate for preparing flexible display screen

A flexible display and composite substrate technology, applied in semiconductor/solid-state device manufacturing, organic semiconductor devices, electric solid-state devices, etc., can solve problems such as black spots or black spots, reduce adhesion, and reduce the occurrence of black spots and black spots rate, the effect of equipment production

Pending Publication Date: 2018-11-13
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide a method for preparing a flexible display and to prepare a composite substrate for a flexible display. By setting a sacrificial layer with residual hydrogen between the substrate and the flexible layer, the laser lift-off (Laser Lift) can be improved. Off, LLO) will produce black spots or black spots in the process

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  • Preparation method of flexible display screen and composite substrate for preparing flexible display screen
  • Preparation method of flexible display screen and composite substrate for preparing flexible display screen

Examples

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preparation example Construction

[0037] Also, please refer to figure 2 , in another embodiment of the present invention, also proposes a kind of preparation method of flexible display screen, wherein preparation method comprises the following steps:

[0038] Step 500: Using a hydrogen-containing substance as a material, form a sacrificial layer 200 on the substrate 100 by chemical vapor deposition; of course, in other embodiments, this material may not be limited, and this specific method may not be limited;

[0039] In a preferred embodiment, the hydrogen-containing substance can be silane (SiH 4 ).

[0040]In a preferred embodiment, for the method of chemical vapor deposition of the sacrificial layer, it is preferable not to dehydrogenate the sacrificial layer 200 after the step of chemical vapor deposition of the sacrificial layer, so as to retain the hydrogen content in the sacrificial layer 200;

[0041] In a preferred embodiment, the hydrogen content in the sacrificial layer 200 can be adjusted by co...

Embodiment 1

[0053] A flexible display is prepared by using the composite substrate of the present invention: wherein the composite substrate includes a substrate 100 , a sacrificial layer 200 and a flexible layer 300 arranged in sequence. Wherein the substrate 100 is a glass layer (the material and thickness are the same as in Example 1), the flexible layer 300 is polyimide (the material and thickness are the same as in Example 1); the sacrificial layer 200 is prepared by a chemical vapor deposition process and has not been removed. A hydrogen-treated amorphous silicon (a-Si) layer, the thickness of the amorphous silicon (a-Si) layer being 5 nm.

[0054] After the flexible display is prepared, the substrate in the composite substrate is laser peeled off: a laser beam with a power of 19.3W is irradiated on the composite substrate from the side where the substrate 100 is located, so as to further peel off the corresponding substrate 100 and sacrificial layer 200 .

[0055] Taking 41 samples...

Embodiment 2

[0057] The composite substrate of the present invention is used to prepare a flexible display screen: wherein, the structure of the composite substrate is referred to in Embodiment 1, and the sacrificial layer 200 in the composite substrate is an amorphous silicon (a-Si) layer prepared by the same process as in Embodiment 1. The thickness of the amorphous silicon (a-Si) layer is 10 nm.

[0058] After the flexible display is prepared, the substrate in the composite substrate is laser peeled off: a laser beam with a power of 22.1 W is irradiated on the composite substrate from the side where the substrate 100 is located to further peel off the corresponding substrate 100 and sacrificial layer 200 .

[0059] Taking 45 samples as the base for testing, after laser peeling, the number of samples with black spots or black spots on the flexible display screen is 0, and the occurrence rate of black spots and black spots is 0% according to statistics.

[0060] As shown in Examples 1-2 a...

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Abstract

The invention relates to a composite substrate for preparing a flexible display screen. The composite substrate structurally comprises a substrate, a sacrificial layer arranged on the substrate, and aflexible layer arranged on the sacrificial layer; and the sacrificial layer is a hydrogen element contained semi-transparent inorganic layer. A preparation method of the flexible display screen comprises the following steps that the sacrificial layer is deposited on the substrate, the flexible layer is formed on the sacrificial layer; an electronic component is formed on the flexible layer; and the substrate is irradiated by laser, so that the hydrogen elements in the sacrificial layer form hydrogen bubbles to peel the sacrificial layer from the inorganic layer. The sacrificial layer is arranged to reduce a bonding force between the substrate and the flexible layer during laser peeling, the peeling effect is improved, the flexible layer is protected, and the occurrence rate of shading anddark spots is reduced.

Description

technical field [0001] The invention relates to the technical field of flexible display, in particular to a method for preparing a flexible display and a composite substrate for preparing a flexible display. Background technique [0002] Active-matrix organic light emitting diode (Active-matrix organic light emitting diode, AMOLED) display technology has attracted more attention in recent years, and most flexible display screens currently use this display technology. In the research and development of flexible display screens, one of the technical difficulties to be overcome is the problem of laser lift off (Laser Lift Off, LLO) on the flexible substrate with glass. In the laser lift off (Laser Lift Off, LLO) process of a flexible substrate with glass, the flexible substrate may be damaged, and then the water vapor intrusion will cause the organic light-emitting material to fail, which will cause black spots when the organic light-emitting diode emits light. Or black spots,...

Claims

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Application Information

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IPC IPC(8): H01L51/00H01L51/52H01L51/56B82Y40/00
CPCB82Y40/00H10K71/80H10K77/111Y02E10/549H10K2102/311H10K71/00H10K2102/351
Inventor 刘林佳朱阳杰陆海峰
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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