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Sheet material etching device

An etching device and sheet technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problem of affecting the encapsulation sheet etching effect and encapsulation effect, affecting the encapsulation effect of organic light-emitting devices, and hindering the contact between the agent and the encapsulation sheet. and other problems, to achieve the effect of excellent etching effect, improved safety and reliability, and improved yield.

Inactive Publication Date: 2018-08-17
JIUJIANG VISIONOX TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The immersion mode is to immerse the whole encapsulation sheet in acidic chemicals for etching. The etching effect of this method is poor, the surface of the prepared encapsulation sheet is uneven, and the edges of the pattern are mostly zigzag and not smooth, which in turn affects the encapsulation effect of organic light-emitting devices.
The spray mode is usually to spray the agent downwards, and the agent will chemically react with the horizontally moving packaging sheet below. In this method, the agent will easily form a water film on the horizontally moving packaging sheet due to gravity, which will hinder the new agent and packaging. chip contact, resulting in a "pool effect" on the upper surface of the package chip, affecting the etching effect and packaging effect of the package chip

Method used

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  • Sheet material etching device
  • Sheet material etching device

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Comparison scheme
Effect test

Embodiment

[0046] This embodiment provides a sheet etching device, such as figure 1 and figure 2 As shown, a conveying assembly 1 and a spraying assembly 2 are included. in,

[0047] The conveying assembly 1 is used to convey the sheet along a first direction, and the plane where the sheet is located is perpendicular to the horizontal plane. Specifically, the first direction refers to figure 1 The direction of the line shown in or the conveying direction of the conveying assembly, that is, the sheet moves along the direction of the line in an upright state perpendicular to the horizontal plane.

[0048] The spray assembly 2 is arranged on at least one side of the sheet, and is used for spraying the treatment liquid on the surface of the sheet. Specifically, the spray assembly 2 may be arranged on only one side of the sheet along the line direction, or may be arranged on both sides of the sheet along the line direction, and the setting may be determined according to actual etching re...

Embodiment approach

[0066] As a preferred embodiment, the sheet etching device further includes a filter element 3 . The filter element 3 is arranged vertically below the sheet and connected to the liquid storage element 21 for collecting and filtering the treatment liquid flowing through the sheet, and the filtered treatment liquid flows back into the liquid storage element 21 . In this way, the recycling of the treatment liquid is realized, the utilization rate of the treatment liquid is significantly improved, and the cost of the treatment liquid is saved for the sheet material etching device.

[0067] In this embodiment, the sheet etching device further includes an air curtain wind cutting unit 4 , an acid washing wind cutting unit 5 , an etching unit 6 , a water washing unit 7 and an air knife drying unit 8 arranged in sequence in the first direction.

[0068] Among them, the air curtain wind cutting unit 4 , the pickling wind cutting unit 5 and the air knife drying unit 8 mainly dry the sur...

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Abstract

The invention relates to the field of display equipment manufacturing, and discloses a sheet material etching device which comprises a conveying assembly and a spraying assembly. A sheet material is disposed on the conveying assembly, and a plane where the sheet material is located is perpendicular to a horizontal plane. The spraying assembly is disposed at at least one side of the sheet material,and the interior of the spraying assembly is provided with treatment fluid. According to the invention, when the conveying assembly conveys the sheet material, the plane where the sheet material is located is perpendicular to the horizontal plane, so the treatment fluid is sprayed to a specified position and then is automatically discharged under the action of gravity when the spraying assembly at a side of the sheet material sprays the treatment fluid to the surface of the sheet material. The surface of the sheet material is more uniform, and the edges of the sheet material are more smooth,and the etching effect is excellent. A conventional immersing mode cannot cause the non-uniform surface, pattern edge multi-sawtooth shape and unevenness of the sheet material, and a conventional spraying mode cannot cause a pool effect of the surface of the sheet material.

Description

technical field [0001] The invention relates to the field of display equipment manufacturing, in particular to a sheet material etching device. Background technique [0002] With the development of information technology, organic electroluminescent devices have become one of the most concerned technologies in flat panel display technology because of their advantages such as high contrast, wide viewing angle, low power consumption, and thin volume. [0003] Studies have shown that components such as water vapor and oxygen in the air have a great influence on the life of organic electroluminescent devices. The main reason is to consider the following aspects: when organic electroluminescent devices work, electrons are injected from the cathode, which requires the cathode The lower the work function, the better, but the metals used to make the cathode, such as aluminum, magnesium, calcium, etc., are generally more active and easily react with the infiltrated water vapor. Moreo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/6708
Inventor 孙红帅严志峰孙剑高裕弟葛亮
Owner JIUJIANG VISIONOX TECH CO LTD
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