Preparation method of nanometer metal grating and nanometer metal grating

Abstract

The invention provides a preparation method of a nanometer metal grating and a nanometer metal grating. The method includes providing a substrate on which a metal layer is arranged; forming an impression glue layer on the metal layer; impressing the impression glue layer with an impression template with a grating period pattern; solidifying a impression glue layer, removing the impression template after the solidification, forming the impression glue with the grating period pattern, and remaining the impression glue at the bottom of the grating period pattern; removing the residual impression glue by means of oxygen ashing, exposing the metal layer at the bottom of the grating period pattern, and forming a metal oxide film on the surface of the exposed metal layer; removing the impression glue with the grating period pattern; and taking the metal oxide film as a mask layer, and patterning the metal layer to form a nanometer metal grating. The method is advantageous in that the problem that the metal layer in the prior art cannot be etched after the oxidation is solved; and the metal oxide film is taken as the mark layer for the subsequent technology, and can be used as a nanometer metal grating protective layer.

Description

technical field [0001] The invention relates to the liquid crystal display field, in particular to a method for preparing a nanometer metal grating and the nanometer metal grating. Background technique [0002] Nano-metal gratings can transmit incident light whose electric field direction is perpendicular to the direction of the grating, and reflect light whose electric field direction is parallel to the direction of the grating. Based on this working principle, the reflected light can be reused by adding an anti-reflection film, etc. , so the ability of the nano metal grating as a display polarizer to transmit incident light is far greater than that of the traditional polarizer, the transmittance can reach more than 90%, and the contrast ratio is also as high as 10000:1, which can greatly improve the transmittance of the LCD Ratio and contrast, to meet the needs of high penetration and high contrast in the market. [0003] Nano-imprinting technology is to use stamps with n...

AI Technical Summary

Problems solved by technology

[0012] The technical problem to be solved by the present invention is to provide a method for preparing a nano-metal grating and a nano-metal grating, which solve the problem that etching cannot be performed after the metal layer is oxidized

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