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A hemt array electronically controlled terahertz wave modulator with network dislocation distribution

A dislocation distribution, terahertz wave technology, applied in instruments, nonlinear optics, optics, etc., to achieve the effect of enhancing resonance strength, improving terahertz wave transmittance, and simple structure

Active Publication Date: 2019-06-21
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Claims
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Problems solved by technology

However, there are few reports on related high-performance devices, and how to achieve high-efficiency and high-speed modulation of the amplitude has become a bottleneck in this research field.

Method used

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  • A hemt array electronically controlled terahertz wave modulator with network dislocation distribution
  • A hemt array electronically controlled terahertz wave modulator with network dislocation distribution
  • A hemt array electronically controlled terahertz wave modulator with network dislocation distribution

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Embodiment Construction

[0035] The present invention will be described in more detail below in conjunction with the accompanying drawings and examples.

[0036] This specific embodiment provides a HEMT array electronically controlled terahertz wave modulator with network dislocation distribution, its structure is as follows figure 1As shown, it includes a semiconductor substrate 1 , a heterostructure epitaxial layer 2 , a modulation cell array 5 , a positive voltage loading electrode 3 and a negative voltage loading electrode 4 . The positive voltage loading electrode 3, the negative voltage loading electrode 4 and the modulation unit array 5 constitute a metal structure layer, and the lower surface of the metal structure layer is provided with a heterostructure epitaxial layer 2 and a semiconductor substrate 1 in sequence. The modulation unit array 5 is an M×N array composed of a plurality of modulation units, where M≥3 and N≥4. The modulation unit includes a HEMT and a metal resonant structure, an...

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Abstract

The invention provides a HEMT array electronically controlled terahertz wave modulator with mesh dislocation distribution, belonging to the technical field of electromagnetic functional devices. The modulator provided by the present invention is composed of a semiconductor material substrate, a heterostructure material epitaxial layer, an artificial microstructure, and a socket circuit. By applying an external voltage signal, the concentration of 2-DEG in the epitaxial layer is changed, thereby changing the artificial microstructure The electromagnetic resonance mode of the terahertz wave can be modulated. The modulator provided by the present invention works in the state of electromagnetic wave transmission, and has a modulation depth as high as 92.8% and a modulation rate above 600MHz; it can be realized by micro-fabrication technology, and the preparation process is mature and reliable; it belongs to an external terahertz amplitude modulation device with independent The advanced device packaging and feeding network are very easy to integrate with various terahertz communication, imaging or detection systems, and have good practical application value in terahertz wireless communication, terahertz spectrum technology, terahertz security imaging and other fields.

Description

technical field [0001] The invention belongs to the technical field of electromagnetic functional devices, and also belongs to the field of communication devices including modulators, filters, electric control switches, etc., and specifically relates to a HEMT (High Electron Mobility Transistor) array electronically controlled Terahertz wave modulator. Background technique [0002] Terahertz wave is a new type of electromagnetic spectrum between photonics and electronics, usually referring to electromagnetic radiation with a frequency within 0.1THz to 10THz. In recent years, thanks to the rapid development of terahertz source and detection technology, terahertz wave-based imaging, spectrum analysis, electronic information, radar positioning and other technical fields have shown great application prospects. At the same time, terahertz wireless communication technology, as one of the important directions in the terahertz field, is currently receiving attention from all over t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/015
CPCG02F1/015
Inventor 张雅鑫赵运成梁士雄杨梓强
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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