Superhard multi-layer composite diamond-like coating and preparation method thereof

Abstract

The invention discloses a superhard multi-layer composite diamond-like coating. The coating is sequentially composed of a micro drilling base body, a bottom bonding layer, a middle transition layer and a surface layer. The bottom bonding layer is a metallic titanium or metallic chromium layer, the middle transition layer is a low-hardness diamond-like film, and the surface layer is a composite diamond coating. The composite diamond coating is a titanium or titanium doped diamond-like coating. According to a preparation method of the superhard multi-layer composite diamond-like coating, the cathode filter electric arc technology, the ion beam technology and the vacuum sputtering technology are combined, and super-thick diamond-like composite coating deposition is achieved on a sample base. The obtained superhard diamond-like coating has the beneficial effects of being high in film base combination strength, low in internal stress, low in friction coefficient and long in service life.

Description

technical field [0001] The invention relates to a diamond-like coating, in particular to a superhard multilayer composite diamond-like coating and a preparation method thereof. Background technique [0002] Due to its high hardness, ultra-low friction coefficient, high wear resistance and corrosion resistance, diamond-like coatings have shown broad application prospects in the fields of machinery, electronics, and biomedicine. However, DLC also has its own disadvantages, which limit its application. [0003] At present, the main problems that plague researchers in the preparation of ultra-thick diamond-like coatings are: [0004] 1. The bonding force between the diamond-like coating and the substrate surface of stainless steel, aluminum alloy, titanium alloy, copper and ceramics is poor, and it is easy to fall off and fail under wear or corrosion conditions; [0005] 2. The diamond-like carbon coatings obtained by various preparation methods generally have high internal st...

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Problems solved by technology

[0004] 1. The bonding force between the diamond-like coating and the substrate surface of stainless steel, aluminum alloy, titanium alloy, copper and ceramics is poor, and it is easy to fall off and fail under wear or corrosion conditions;

[0005] 2. The diamond-like carbon coatings obtained by various preparation methods generally have high internal stress (sometimes as high as 10GPa). When the coating reaches a certain thickness, the large compressive stress makes the coating prone to cracking and peeling, which limits the diamond-like carbon coating. Coating Deposition Thickness

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