A Bipolar Organic Field Effect Transistor with Vertical Laminated Structure
A laminated structure, bipolar technology, applied in the manufacture of electrical components, electric solid-state devices, semiconductor/solid-state devices, etc. The effect of high carrier mobility
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[0024] Such as figure 1 As shown, a bipolar organic field effect transistor with a vertical laminated structure, its preparation steps are as follows:
[0025] 1) The heavily doped silicon wafer ① was ultrasonically cleaned with acetone, ethanol, and deionized water for 30 minutes, and then dried in a glove box for 1 hour to clean the surface of the heavily doped silicon wafer;
[0026] 2) Place the above heavily doped silicon wafer in a UV / ozone environment for 120 minutes to obtain SiO 2 Gate dielectric layer②;
[0027] 3) On SiO 2 Positive photoresist is coated on the gate dielectric layer. After pre-baking, exposure, development, and film hardening processes, a channel is obtained by photolithography. The channel length is 200nm; P-type active layer pentacene③, control the evaporation rate to a vacuum of 1×10 -4 Pa; remove the glue after evaporation;
[0028] 4) Repeat step 3) to obtain a channel by photolithography, and the length of the channel is also 200nm; then u...
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