Cadmium sulfide target material preparing method and device

Abstract

The invention provides a cadmium sulfide target material preparing method. The method comprises the steps that cadmium sulfide powder is loaded in a mold to be subjected to prepressing molding, and prepressed cadmium sulfide powder is obtained; the prepressed cadmium sulfide powder is loaded in a hot-press sintering furnace, hot-press vacuum sintering is performed, and a cadmium sulfide target material is obtained. According to the method, cadmium sulfide target material preparing, sintering and pressing are simultaneously performed on same equipment in a same technology, the middle links and operation steps are few, and pollution to the target material and environment is little; by taking the high-purity cadmium sulfide powder as the raw material, cadmium chloride does not need to serve as cosolvent, and the purity of the target material is high. The invention further provides a cadmium sulfide target material preparing device.

Description

technical field [0001] The invention belongs to the field of semiconductor materials, and in particular relates to a method and a device for preparing a cadmium sulfide target material. Background technique [0002] Cadmium sulfide is an inorganic compound of sulfur and cadmium with the chemical formula CdS. It is an N-type optoelectronic semiconductor material, belonging to II-VI group compound semiconductors. The molecular weight is 144.76, which belongs to the hexagonal lattice structure, and the lattice constant is 5.86×10 -10 m, melting point 1750°C, boiling point 980°C. The band gap is 2.41 electron volts, and the mobility of electrons and holes is 2×10 -2 and 2×10 -3 Square meter / volt second, relative permittivity 11.6. [0003] The outstanding advantage of the cadmium sulfide photoconductor is that the potential difference of the electrostatic latent image is large, and the image contrast of the copied image is large. Because of the insulating film on the sur...

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Problems solved by technology

[0005] In the existing methods for preparing cadmium sulfide targets, since cadmium chloride is used as a cosolvent, although chlorine will volatilize during the sintering process, some parts will still remain in the target and become impurity elements, and the purity of the target is low; Moreover, the preparation of cadmium sulfide targets in the prior art requires multiple equipment to complete, and there are many intermediate links and operation steps, which reduce the purity of cadmium sulfide targets; due to the toxicity of cadmium sulfide dust, the cadmium sulfide dust diffused into the air during the preparation process is harmful to The environment also pollutes