Preparation technology for copper/graphite core-shell structure
A technology of core-shell structure and preparation process, applied in the direction of coating, etc., can solve problems such as limited application
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment Construction
[0008] A preparation process of a copper / graphite core-shell structure, which is characterized in that: RF-PECVD equipment is used, and the copper film prepared by DPS-Ⅲ type ultra-high vacuum magnetron sputtering on the target is used as the copper source, and the copper / graphite core-shell structure is successfully prepared. Graphite core-shell structure (GS / CC) materials.
[0009] Preparation of copper thin film: a DPS-Ⅲ type ultra-high vacuum magnetron sputtering coating device for the target is used to prepare a copper thin film with a thickness of 120nm. The substrate used is single crystal Si100, and the target material is a high-purity copper target (99.95% pure) with a diameter of 6 cm. The Si (100) substrate was ultrasonically cleaned with acetone, alcohol, and deionized water for 15 minutes, and then placed on the sample stage of the coating equipment. When the background pressure of the vacuum chamber was lower than 5×10 4 After Pa, the copper film was deposited o...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
diameter | aaaaa | aaaaa |
purity | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com