Laser direct writing photolithographic system combined with single quantum dot locating function and method thereof
A laser direct writing, single quantum dot technology, which is used in microlithography exposure equipment, photolithographic process exposure devices, and light metering using electrical radiation detectors. Institutional Effects
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[0043] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0044] see figure 1 , the present invention provides a laser direct writing lithography system combined with single quantum dot positioning function, which includes:
[0045] The laser direct writing exposure optical path is used to locate the coordinates of the single quantum dots on the sample, and complete the laser direct writing lithography function according to the coordinates of the single quantum dots, and transfer the designed mask pattern to the photoresist;
[0046] Single-photon anti-bunching test optical path, use the microscope objective lens to locate whether there is light in the focused material area on the sample and whether the light-emitting point is a single photon;
[0047] A controller system is us...
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