MgB2/BN/MgB2 Josephson junction and preparation method thereof

A vapor deposition method and manipulator technology, applied in the manufacture/processing of superconductor devices, devices containing a node of different materials, etc., to achieve excellent performance, improve compactness, and enhance the probability of heat dissipation

Active Publication Date: 2015-04-29
PEKING UNIV
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  • Summary
  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0005] The object of the invention is to provide a method for preparing MgB 2 / BN / MgB 2 Josephson junction method to solve MgB 2 Heat Dissipation Problems and Best Substrate MgB for Large-scale Use of Array Junction in the Future 2 The adoption of the Josephson junction and the application of weak electricity can also be used to study the physical problems of the double energy gap.

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  • MgB2/BN/MgB2 Josephson junction and preparation method thereof

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Embodiment Construction

[0020] Below in conjunction with the accompanying drawings, the present invention will be further described through the embodiments, but the embodiments are not intended to limit the present invention, and those skilled in the art can make various transformations and changes without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention is defined by the scope of claims.

[0021] The reaction chamber device used in the experiment is as follows: figure 1 As shown, the manipulators 1 and 2 are added to the existing HPCVD equipment, the magnesium block 3 is placed on the manipulators 1 and 2, and the heating wire 5 is arranged under the sample stage 6 to heat the sample stage 6 and the manipulator. The cooling water 4 is circulated to lower the temperature to prevent the reaction bulkhead from reacting with magnesium and boron atoms due to the hot wall effect, which will affect the formation of the required film. ...

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Abstract

The invention discloses a MgB2 / BN / MgB2 Josephson junction and a preparation method thereof. A mechanical arm-assisted hybrid physical-chemical vapor deposition method is used, a high vacuum condition is needless, and the MgB2 / BN / MgB2 Josephson junction can be obtained on a substrate in an in-situ mode at a time under the vacuum condition of 2-7 Pa. According to the method, two needed layers of MgB2 films and a BN barrier layer can be grown continuously, and impurity pollution in the growing process is avoided; the performance of a BN layer which is grown through a CVD method is excellent, the thermal conductivity is good, the BN layer is suitable for being used as the barrier layer, the compactness of the barrier layer is improved, the heat dissipation probability of the Josephson junction in the working process is increased, and the matched degree of the Josephson junction and the MgB2 is improved.

Description

technical field [0001] The present invention relates to MgB 2 Application of thin film superconducting materials, specifically related to a kind of MgB 2 / BN / MgB 2 The invention relates to a preparation method of a Josephson junction, which belongs to the application field of weak electric superconductivity. Background technique [0002] The mature Josephson tunnel junction technology is mainly based on niobium, but it must work at a liquid helium temperature of 4.2K. Other high-temperature superconducting materials have complex structures, and the theory and preparation methods are not perfect. MgB 2 It has the highest transition temperature among BCS superconductors, and its superconducting transition temperature is about 39K, which has broad application prospects in the field of weak electricity. But currently about making MgB 2 There are few research reports on superconducting Josephson junctions, and the process is not yet stable. [0003] Preparation of MgB on c...

Claims

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Application Information

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IPC IPC(8): H01L39/22H01L39/24
Inventor 胡慧冯庆荣王越张焱
Owner PEKING UNIV
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