On-chip integrated beam combining laser based on photonic crystal y-waveguide and manufacturing method thereof

Abstract

On-chip integrated beam-combining laser based on photonic crystal Y-waveguide and its manufacturing method belong to the field of optoelectronic semiconductor technology. On the bottom, an n-type buffer layer, an n-type cladding layer, a lower waveguide layer, a quantum well, an upper waveguide layer, a p-type cladding layer, and a p-type capping layer are sequentially grown by metal-organic chemical vapor deposition, and it also includes three lasers. Three lasers are connected to a rectangular waveguide, in which two parallel lasers with a certain distance are connected to the left side of the rectangular waveguide, and the other laser is connected to the right side of the rectangular waveguide; a rectangular waveguide is connected to the three lasers ; The three lasers and the rectangular waveguide are formed on the p-type cover layer by etching down to the p-type cladding layer; a Y-waveguide two-dimensional photonic crystal, the photonic crystal is located on the rectangular waveguide.

Description

technical field [0001] The invention relates to an on-chip integrated beam combining laser based on a photonic crystal Y waveguide and a manufacturing method thereof, belonging to the technical field of optoelectronic semiconductors. Background technique [0002] Semiconductor lasers are widely used in many fields such as industry, military, medical treatment, and communications. Their main applications include material processing, laser printing, reading and writing of optical storage, laser ranging, pumping solid-state lasers, optical communications, and optical storage. Interconnection, etc., but low power limits the further application of semiconductor lasers. The output power can be increased by combining beams, and the beam quality can be improved by collimating the fast and slow axes, which provides possibilities for more and wider applications. However, beam combining requires a large number of optical elements, which not only increases the cost but also increases t...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the shortcomings of semiconductor laser unit devices that can not take into account high output power and high beam quality, the present invention proposes an on-chip integrated beam combining laser based on photonic crystal Y waveguide and its manufacturing method to provide high power and high beam quality the laser

Images