Photosensitizer containing diazo group, photoresist composition and preparation methods of photosensitizer and photoresist composition
A photosensitive agent and photoresist technology, which is applied in the field of diazo group-containing photosensitive agent, photoresist composition and its preparation, can solve the problems of poor adhesion and corrosion resistance, poor storage stability, and small exposure wide capacity , to achieve the effect of not easy to decompose, not easy to residue, and high storage stability
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[0031] Based on the present invention, the present invention provides a curcumin photosensitizer containing diazo group capable of improving thermal stability and resolution of photoresist, a preparation method thereof and a photoresist composition containing the photosensitizer.
[0032] The curcumin sensitizer containing diazo group of the present invention has a structural formula as shown in formula I:
[0033]
[0034] The invention provides a positive photoresist composition for LCD TFT. In order to obtain higher resolution, the photoresist composition of the invention includes a film-forming resin, a photosensitive agent and an organic solvent. Wherein the sensitizer is the above-mentioned curcumin sensitizer containing a diazo group.
[0035] Specifically, the photoresist composition consists of 50-90 parts by mass of film-forming resin, 10-50 parts by mass of the curcumin sensitizer containing diazo groups, 1-10 parts by mass of dye additives and 200 parts by mass ...
Embodiment 1-3
[0053] Embodiment 1-3 is the synthetic example of diazocurcumin sensitizer
Embodiment 1
[0054] Embodiment 1: the synthesis of the curcumin sensitizer containing diazo group
[0055] 1.2mmol NaN 3 Add 20mL of acetonitrile, heat to 94°C to dissolve and disperse evenly, cool to 0°C, add 1.2mmol of 2-chloro-1,3-dimethyl imidazolinium chloride, stir for 1h, at this time, in the reaction mixture Add (1.0mmol) curcumin dissolved in 3mL tetrahydrofuran (THF) obtained solution, then add 2.0mmol triethylamine, react at 0°C for 2h. Poured into 40 mL of water, extracted with 100 mL of ethyl acetate, collected the organic phase, dried over anhydrous sodium sulfate, filtered, and rotary evaporated to obtain an orange solid product with a yield of 94.8%.
[0056] Carrying out infrared, nuclear magnetic and mass spectrum analysis to final product shows that the product obtained is the compound shown in formula I, and the purity of product is very high, reaches 95%.
[0057]
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