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A preparation process of a multi-layer mixed nano-reinforced layer of iron+vanadium+titanium+titanium nitride deposited on a metal surface

A preparation process and metal surface technology, applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problems of poor bonding force, reduced film hardness and surface quality, and poor substrate bonding force.

Active Publication Date: 2016-08-10
GUILIN UNIV OF ELECTRONIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the general coating is relatively thin, and if it is too thick, it will have a large internal stress with the substrate, showing poor bonding with the substrate and easy to peel off; arc ion plating technology has the characteristics of high ionization rate, fast deposition rate and high deposition ion energy. , but during the ion plating process, the target will evaporate and sputter large particles, resulting in a decrease in film hardness and surface quality, and poor adhesion

Method used

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Examples

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Embodiment Construction

[0021] The present invention will be further illustrated below by specific examples

[0022] The quenched T10 steel is used as a sample, and ultrasonic cleaning is carried out in a mixture of alcohol and acetone for more than half an hour.

[0023] Dry the cleaned sample, hang it on the fixture, and place it on the turntable of the vacuum chamber, and the workpiece frame rotates while revolving. After installing the sample, wipe the sealing ring with absolute alcohol to ensure that there are no impurities on it, and close the chamber door.

[0024] Turn on the vacuum system and pump to 8×10 -4 Turn on the heating system at Pa, heat to 200°C, and then evacuate to Pa; pass argon gas to 5 Pa, and clean the sample with -700V bias for 15 minutes; after cleaning, turn off the bias, evacuate to Pa, and keep the test The sample temperature is 200°C, the argon gas is introduced and the working pressure is adjusted to 0.5Pa, and the pure iron target power supply is turned on. Here, th...

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Abstract

The invention discloses a preparation process for depositing iron+vanadium+titanium+titanium nitride multilayer mixed nano-reinforced layer on the surface of a metal, which utilizes the magnetron sputtering technology to sequentially deposit nanoscale thickness iron+ A mixed transition layer of iron-vanadium+vanadium+vanadium-titanium+titanium+titanium-titanium nitride; finally, a nano-scale titanium nitride strengthening layer is compositely deposited to form a multi-layer mixed transition composite strengthening layer with good bonding force. The present invention uses the concept of solid solubility of various metal atoms to seek alloy elements with infinite mutual solubility and high strength as the transition layer, and uses magnetron sputtering to deposit a mixed nano-transition layer on the surface of the metal material substrate, and finally deposits titanium nitride to form The multi-layer mixed nano-reinforced layer makes the composition gradient distribution of the transition layer gentle and the residual internal stress is small, which greatly increases the bonding strength of the film base and the bonding force with the substrate, and can give full play to the properties of the titanium nitride cermet film on the surface. Corrosion resistance, wear resistance, high hardness characteristics.

Description

technical field [0001] The invention relates to surface engineering technology, in particular to a preparation process for depositing iron+vanadium+titanium+titanium nitride multilayer mixed nano-reinforced layer on the metal surface. Background technique [0002] Titanium nitride is a cermet, which belongs to the hard film coating. It can effectively improve the surface hardness, wear resistance and corrosion resistance of materials, and greatly improve the service life of parts. Therefore, it is widely used in machinery manufacturing, automobile industry, and textile industry. , geological drilling, mold industry, aerospace and other fields. At present, the main preparation techniques of titanium nitride thin films are magnetron sputtering, arc ion plating, etc. The magnetron sputtering preparation technology deposits fine particles, good film compactness and excellent surface quality. However, the general coating is relatively thin, and if it is too thick, it will have a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/06
Inventor 高原王成磊韦文竹陆小会张光耀
Owner GUILIN UNIV OF ELECTRONIC TECH
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