Technology for preparing multilayer mixed nanometer strengthening layer with metal surface deposited with iron, vanadium, titanium and titanium nitride
A preparation process and metal surface technology, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problems of film hardness and surface quality reduction, poor bonding force, poor substrate bonding force, etc.
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[0021] The present invention will be further illustrated below by specific examples
[0022] The quenched T10 steel is used as a sample, and ultrasonic cleaning is carried out in a mixture of alcohol and acetone for more than half an hour.
[0023] Dry the cleaned sample, hang it on the fixture, and place it on the turntable of the vacuum chamber, and the workpiece frame rotates while revolving. After installing the sample, wipe the sealing ring with absolute alcohol to ensure that there are no impurities on it, and close the chamber door.
[0024] Turn on the vacuum system and pump to 8×10 -4 Turn on the heating system at Pa, heat to 200°C, and then evacuate to Pa; pass argon gas to 5 Pa, and clean the sample with -700V bias for 15 minutes; after cleaning, turn off the bias, evacuate to Pa, and keep the test The sample temperature is 200°C, the argon gas is introduced and the working pressure is adjusted to 0.5Pa, and the pure iron target power supply is turned on. Here, th...
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