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TiZrAlSiON nano composite superhard coating cutter and preparation method thereof

A nano-composite coating, nano-composite technology, applied in the direction of coating, nanotechnology, nanotechnology, etc., to achieve the effect of low friction coefficient, improved high temperature oxidation resistance, and high hardness

Active Publication Date: 2014-09-24
东莞市鑫硕机械科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There is no preparation of relevant TiZrAlSiON nanocomposite coatings in domestic and foreign literature and materials. Therefore, the present invention provides a TiZrAlSiON nanocomposite superhard coating tool and its preparation method. The nanocomposite coating adopts multi-arc ion plating combined with double Prepared by extremely pulsed magnetron sputtering technology, it has a nanocomposite structure in which nanocrystalline particles are embedded in an amorphous matrix, that is, nanoparticles are TiN and ZrN embedded in an amorphous matrix Al 2 o 3 and Si 3 N 4 It will provide important help to improve the level of modern metal cutting

Method used

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  • TiZrAlSiON nano composite superhard coating cutter and preparation method thereof

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Embodiment 1

[0026] A TiZrAlSiON nanocomposite superhard coating tool, the coating tool includes a carbide tool body and a TiZrAlSiON nanocomposite coating coated on the body, wherein the TiZrAlSiON nanocomposite coating is a multilayer composite structure: including 50 nanometers thick metal The underlying Zr metal layer, the 100nm thick nitride transition layer ZrN, and the 1000nm thick functional layer TiZrAlSiON;

[0027] Its preparation method is to obtain Zr, Ti, Al by arc evaporation Zr target and TiAl alloy target, Si is obtained by magnetron sputtering columnar Si target, and N and O are obtained by passing N through the gas control device. 2 and O 2 implementation, including the following steps:

[0028] First, when the background vacuum of the vacuum chamber reaches 1×10 -3At this time, the Ar gas was introduced to 1 Pa through the gas control, the substrate temperature was adjusted at 300°C, the substrate bias was adjusted at -70V, and the substrate holder speed was at 3 rpm,...

Embodiment 2

[0030] A TiZrAlSiON nanocomposite superhard coating tool, the coating tool includes a cemented carbide tool body and a TiZrAlSiON nanocomposite coating coated on the body, wherein the TiZrAlSiON nanocomposite coating is a multilayer composite structure: including 100 nanometers thick metal The underlying Zr metal layer, the 300nm thick nitride transition layer ZrN, and the 4000nm thick functional layer TiZrAlSiON;

[0031] Its preparation method is to obtain Zr, Ti, Al by arc evaporation Zr target and TiAl alloy target, Si is obtained by magnetron sputtering columnar Si target, and N and O are obtained by passing N through the gas control device. 2 and O 2 implementation, including the following steps:

[0032] First, when the background vacuum of the vacuum chamber reaches 8×10 -3 At Pa, Ar gas is introduced to 3 Pa through gas control, the temperature of the substrate is adjusted at 400 °C, the bias voltage of the substrate is adjusted at -1000 V, the speed of the substra...

Embodiment 3

[0034] A TiZrAlSiON nanocomposite superhard coating tool, the coating tool includes a carbide tool body and a TiZrAlSiON nanocomposite coating coated on the body, wherein the TiZrAlSiON nanocomposite coating is a multilayer composite structure: including 80 nanometers thick metal The underlying Zr metal layer, the 200nm thick nitride transition layer ZrN, and the 3000nm thick functional layer TiZrAlSiON;

[0035] Its preparation method is to obtain Zr, Ti, Al by arc evaporation Zr target and TiAl alloy target, Si is obtained by magnetron sputtering columnar Si target, and N and O are obtained by passing N through the gas control device. 2 and O 2 implementation, including the following steps:

[0036] First, when the background vacuum of the vacuum chamber reaches 7×10 -3 At Pa, Ar gas was introduced to 2.5 Pa through gas control, the temperature of the substrate was adjusted at 350 °C, the bias voltage of the substrate was adjusted at -800 V, and the speed of the substrate...

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Abstract

The invention relates to a TiZrAlSiON nano composite superhard coating cutter and a preparation method thereof, belonging to the technical field of thin-film materials. The coating cutter comprises a hard alloy cutter body, wherein a TiZrAlSiON nano composite coating is plated on the cutter body; the TiZrAlSiON coating comprises a 50-100nm-thick metal base layer-Zr metal layer, a 100-200nm-thick nitride transition layer ZrN and a 1000-4000nm-thick functional layer TiZrAlSiON; and the nano composite coating has a nano composite structure in which nanocrystal particles are embedded in the amorphous matrix, the nanoparticles comprise TiN and ZrN, and the amorphous matrix comprises Al2O3 and Si3N4. The preparation method comprises the following steps: carrying out glow cleaning on the hard alloy cutter, carrying out arc ion bombardment, and sequentially depositing the base metal layer, transition metal nitride layer and TiZrAlSiON coating. The TiZrAlSiON composite coating has the advantages of high hardness, low friction factor, high toughness, high binding force and excellent high-temperature oxidation resistance, has better comprehensive properties than the TiN, CrN and Ti-Al-N coatings which are industrially produced at present, and can effectively enhance the toughness and cutting characteristic of the cutting tool and prolong the service life of the hard alloy cutter body.

Description

technical field [0001] The invention relates to a coating tool, in particular to a TiZrAlSiON nanocomposite superhard coating tool and a preparation method thereof, belonging to the field of thin film materials. Background technique [0002] Modern metal cutting requires tools with high cutting speed, high feed speed, high reliability, long life, high precision and good cutting controllability. The emergence of coated tools has made a major breakthrough in the cutting performance of the tool. It combines the tool matrix with the hard film surface. Because the matrix maintains good toughness and high strength, the hard film surface has high wear resistance. The characteristics of high performance and low friction coefficient greatly improve the performance of the tool. Modern high-speed and high-efficiency machining and the increasing use of difficult-to-machine materials have strict requirements on tool materials, and tool coating materials are also constantly being upgrade...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/32C23C14/06B32B15/04B32B9/04B82Y30/00
Inventor 邹长伟邵乐喜谢伟
Owner 东莞市鑫硕机械科技有限公司
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