Preparation method of multilayer BST thin film based on gradient precrystallization heat treatment
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A thin-film preparation and pre-crystallization technology is applied in the preparation of multilayer BST thin films and in the field of preparation of barium strontium titanate (BST) thin films, which can solve the problems of low tuning rate, many process parameters, complicated processes, etc., and achieve frequency characteristics The effect of stability, small die gap and simplified process
Inactive Publication Date: 2015-07-29
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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However, binary gradient doping involves many process parameters and complicated process, which reduces the dielectric constant and makes the tuning rate low. Therefore, binary gradient doping also needs innovation to simplify the process and improve the tuning rate.
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Embodiment 1
[0040] Example 1 of the present invention: Gradient precrystallization heat treatment with ΔT=20°C and Δt=0 for 6 layers of pure Ba 0.6 Sr 0.4 TiO 3 film preparation
[0041] The implementation steps are as follows:
[0042] It is basically the same as "the steps of Example 2", except that the precrystallization heat treatment temperatures of the first layer to the sixth layer in step (1) are 550°C, 570°C, 590°C, 610°C, 630°C, and 650°C respectively .
Embodiment 4
[0043] Example 4: Gradient precrystallization heat treatment of 8 layers of pure Ba with ΔT=20°C and Δt=0 0.6 Sr 0.4 TiO 3 film preparation
[0044] The implementation steps are as follows:
[0045] It is basically the same as "the steps of Example 2", except that the precrystallization heat treatment temperatures of the first layer to the eighth layer in step (1) are 550°C, 570°C, 590°C, 610°C, 630°C, and 650°C respectively , 670°C and 690°C, the crystallization temperature in step (4) is 690°C.
Embodiment 5
[0046] Example 5: Gradient precrystallization heat treatment of 8 layers of pure Ba with ΔT=10°C and Δt=0 0.6 Sr 0.4 TiO 3 film preparation
[0047] The implementation steps are as follows:
[0048] It is basically the same as "the steps of Example 2", except that the precrystallization heat treatment temperatures of the first layer to the eighth layer in step (1) are 550°C, 560°C, 570°C, 580°C, 590°C, and 600°C respectively , 610°C and 620°C.
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Abstract
The invention discloses a preparation method of a multilayer BST (Barium Strontium Titanate) film based on gradient pre-crystallization heat treatment, belonging to the technical field of functional materials. According to the preparation method, in a process of preparing a multilayer BST film by layers, the BST prepared by layers are subjected to gradient pre-crystallization heat treatment. The BST film based on the gradient pre-crystallization heat treatment has the characteristics of growth along a crystal surface (110), constant and low growth speed, average crystal grain of 20-30 nm, clear crystal boundary, small grain gap, smoothness and compactness, no cracks, no shrinkage cavity, small dielectric temperature coefficient, stable frequency characteristic, and remarkably improved comprehensive dielectric performance. A dielectric constant is 322-398, the tuning rate is 34.5-46.3 percent, the dielectric loss is 0.55-0.97 percent, the leakage current density is 4.2*10<-9>-9.0*10<-8>A / cm<2>, the dielectric temperature coefficient is 1.3*10<-3>-3.4*10<-3> / K, the high-quality factor is 42.9-76.1, and the microwave practicability of the BST film can be met.
Description
technical field [0001] The invention belongs to the technical field of functional materials, and relates to a preparation method of a barium strontium titanate (BST) film, in particular to a preparation method of a multilayer BST film. Background technique [0002] To realize the microwave application of BST thin films, BST thin films must have low dielectric constant, stable temperature and frequency characteristics on the basis of high tuning rate, low dielectric loss, and high quality factor (ratio of tuning rate to loss) . The dielectric constant, tuning rate and dielectric loss of pure BST films are high due to their strong ferroelectricity, and the temperature and frequency characteristics are poor, especially the dielectric loss is often above 3%, sometimes even above 6%, Seriously restrict the microwave application of BST thin film. People have carried out a lot of research on composition optimization, structure improvement, process improvement, etc., but most of t...
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