High-speed snspd with strong absorption structure and its preparation method
A strong absorption, high-speed technology, applied in the field of single-photon detection, can solve the problems of low yield and the decrease of intrinsic quantum efficiency of the detector, so as to reduce the probability of defects, ensure high-quality growth, and reduce the total length Effect
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[0024] The present invention will be described in further detail below with reference to the accompanying drawings and embodiments.
[0025] The present invention provides a comparative SNSPD called "first structure", and the SNSPD of the present invention is called "second structure".
[0026] like figure 1 Shown is the first superconducting nanowire single-photon detector with a strong absorption structure, including an underlying Si substrate-1 on which multiple layers of Si / SiO are deposited 2 The Bragg reflector 2 is formed by periodic arrangement. The top of the Bragg reflector 2 is provided with a bottom resonant cavity-3 formed by epitaxial single crystal Si, and above the bottom resonator cavity-3 there are superconducting nanowires-4, superconducting nanowires-4 There is an upper air resonant cavity 5 thereon, a Si chip 6 is arranged above the upper air resonant cavity 5, and an anti-reflection film-7 is arranged on the Si chip 6.
[0027] Made of multilayer Si / SiO...
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