Preparation method of tabular corundum phase aluminum oxide powder for electronic material polishing

Abstract

The invention discloses a preparation method of flaky corundum phase alumina powder for electronic material polishing. Firstly, aluminum hydroxide is rapidly dehydrated at a certain temperature to generate rhodium phase alumina; fluoride, boric acid and aluminum hydroxide are proportionally The powder additive is obtained by mixing and grinding; the mixed material is obtained by mixing the powder additive in proportion to the ρ-phase alumina; the mixed material is calcined at 1450-1600°C for 2-12 hours, and then ground, classified and dried , you can get flaky corundum phase alumina powder with a single particle crystal thickness of 1-2 microns and a diameter of 8-25 microns. The powder particles prepared by the method of the present invention have low Na2O impurity content, high corundum phase content, and have a special hexagonal sheet structure. When used as abrasives, they can always be in a state of surface-to-surface combination with the processed surface during the grinding and polishing process. , to achieve the effect of grinding and polishing, and meet the technological requirements of polishing electronic materials such as silicon wafers and electronic flat glass.

Description

technical field [0001] The invention relates to the manufacture of abrasive materials, in particular to a method for preparing flaky corundum phase alumina powder for electronic material polishing. Background technique [0002] Corundum phase alumina is the most stable phase among all phases of alumina, with a Mohs hardness of up to 9 and high mechanical strength, so it is widely used in the abrasives industry to grind or polish the surface of the processed object. The corundum phase alumina used for abrasives is generally divided into two categories, one is fused corundum phase alumina, such as white corundum, brown corundum, zirconium corundum, etc., the particle shape of this kind of alumina is irregular, with edges and corners ; One is sintered corundum phase alumina, and most of these aluminas have obvious morphological characteristics, such as spherical, columnar, or flaky. [0003] Patent CN1092381A describes a grading method of flaky alumina; patent CN101182017A des...

AI Technical Summary

Problems solved by technology

However, the flaky alumina obtained by the above-mentioned manufacturing method is all circular flakes, and there is no specific crystal size and particle size distribution. Although some patents mention the aspect ratio and diameter of the crystal, there is no special requirement for the thickness. The fine powder has the same diameter and different thickness. In the working state, some particles can hardly achieve any grinding and polishing effect because of their small thickness, which cannot meet the requirements for grinding and polishing of electronic materials.