Preparation method of thick tungsten coating material and tungsten coating material
A coating material and coating technology, applied in coatings, chemical instruments and methods, metal material coating processes, etc., can solve the problems of slow deposition rate and high preparation cost, achieve fast deposition rate, high thermal conductivity, and reduce Effect of small thermal stress
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Embodiment 1
[0017] Use pure copper as the base material for grinding, polishing, cleaning, dehydration and drying; make pure copper reduce tungsten hexafluoride with hydrogen to deposit tungsten coating in a chemical vapor deposition furnace; keep the purity of tungsten hexafluoride and hydrogen to be greater than 99.9% and 99.99% respectively %; the flow ratio of tungsten hexafluoride and hydrogen is 1:2; the deposition temperature range is 500°C, the deposition rate is 0.4mm / h, and the thickness of the tungsten coating is 1mm.
Embodiment 2
[0019] Use pure copper as the base material for grinding, polishing, cleaning, dehydration and drying; make pure copper reduce tungsten hexafluoride with hydrogen to deposit tungsten coating in a chemical vapor deposition furnace; keep the purity of tungsten hexafluoride and hydrogen to be greater than 99.9% and 99.99% respectively %; the flow ratio of tungsten hexafluoride and hydrogen is 1:4; the deposition temperature range is 600°C, the deposition rate is 0.7mm / h, and the thickness of the tungsten coating is 3mm.
Embodiment 3
[0021] Use pure copper as the base material for grinding, polishing, cleaning, dehydration and drying; make pure copper reduce tungsten hexafluoride with hydrogen to deposit tungsten coating in a chemical vapor deposition furnace; keep the purity of tungsten hexafluoride and hydrogen to be greater than 99.9% and 99.99% respectively %; the flow ratio of tungsten hexafluoride and hydrogen is 1:5; the deposition temperature range is 700°C, the deposition rate is 1mm / h, and the thickness of the tungsten coating is 5mm.
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