A split-pupil laser confocal Raman spectroscopy testing method and device
A technology of spectrum testing and Raman spectroscopy, which is applied in the field of microspectral imaging, can solve problems such as single mode, reduced focus accuracy, and limited application fields, and achieve the effect of improving measurement accuracy and suppressing errors
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[0062] In this embodiment, the dichroic spectroscopic system 6 is a notch filter, the spectral detector 9 is a Raman spectral detector, the image acquisition system 13 is a CCD, and the image magnification system 27 is a magnifying objective lens.
[0063] like Figure 8 As shown, the detection process of split pupil laser confocal Raman spectroscopy is as follows:
[0064] First, the light source system 1 composed of lasers emits excitation light that can excite the Raman spectrum of the sample to be tested. The excitation light is condensed by the third condenser 24 and then enters the second pinhole 25 to become a point light source, and is collimated and expanded by the fourth condenser 26 After the beam, a parallel excitation beam is formed. After the excitation beam passes through the illumination pupil 3 and the measurement objective lens 2 , it is focused on the sample 5 to be measured, and the Raman scattered light carrying the spectral characteristics of the sample ...
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