Self-referencing interferometric alignment system for lithography equipment
A self-referencing interference and alignment system technology, applied in microlithography exposure equipment, optics, photolithography process of pattern surface, etc., can solve problems such as alignment error and affecting signal quality
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[0024] In the following, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings. For the convenience of describing and highlighting the present invention, relevant components existing in the prior art are omitted from the drawings, and the description of these known components will be omitted.
[0025] The purpose of the present invention is to provide an improved self-referencing interference alignment system, which can effectively eliminate the signal quality deterioration caused by the light intensity fluctuation (that is, optical noise) irradiated on the mark, and obtain better alignment signals , thereby improving the repeatability of the alignment.
[0026] Such as image 3 As shown, the alignment system provided by the present invention includes a laser light source module 400 , an optical module 300 , an electronic acquisition module 500 , and a software module 600 . Wherein, the laser light so...
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