Ferrite thin film-forming composition material, ferrite thin film, and method of forming ferrite thin film

A technology of ferrite thin film and composition, which is applied in liquid application, application of magnetic film to substrate, thermal decomposition application, etc. It can solve the problems of deterioration of coating film, poor storage stability, difficulty in further improving magnetic permeability, etc. , to achieve the effects of reduced film loss, increased magnetic permeability, and improved storage stability

Inactive Publication Date: 2013-10-23
MITSUBISHI MATERIALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In a film formed using this composition (mixed solution), there is a problem that it is difficult to further improve properties such as magnetic permeability
One of the reasons is considered to be that, due to the solvent used, etc., it is difficult to further improve the applicability or uniformity of film thickness when coating by a spin coating method, etc. film density in
[0007] In addition, the composition shown in the above-mentioned conventional non-patent document 1 has poor long-term storage stability, and there is a tendency that liquid phase precipitation occurs over time, thereby deteriorating the coating film property.

Method used

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  • Ferrite thin film-forming composition material, ferrite thin film, and method of forming ferrite thin film
  • Ferrite thin film-forming composition material, ferrite thin film, and method of forming ferrite thin film
  • Ferrite thin film-forming composition material, ferrite thin film, and method of forming ferrite thin film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-2

[0051]

[0052] The ratio of acetonitrile when the adjusted composition is 100% by mass is set to the ratio shown in Table 1 below, except that a composition for forming a ferrite thin film was prepared in the same manner as in Example 1-1, and a composition having NiZn ferrite films of the thicknesses shown in Table 1.

Embodiment 1-4～ Embodiment 1-9、 comparative example 1-3～ comparative example 1-6

[0054] The ratio of each metal material is adjusted so that the combination of the formed ferrite thin film becomes the combination shown in the following Table 1, except that it is the same as Example 1-1 or Example 1-2 to prepare a ferrite thin film. composition, and formed a NiZn ferrite film having the thickness shown in Table 1.

[0055]

[0056] First, copper (II) nitrate trihydrate, zinc (II) nitrate tetrahydrate, and iron (III) nitrate nonahydrate were prepared as metal materials and weighed separately so that the formed ferrite thin film would be combined into ( Cu 0.40 Zn 0.60 O) 1.0 (Fe 2 o 3 ) 1.0 . In addition, as a solvent, prepare acetonitrile in an amount corresponding to 30% by mass relative to 100% by mass of the adjusted composition, and prepare propylene glycol as a solvent in an amount corresponding to 10% by mass, add and mix these to the above-mentioned metal material, and use an oil bath at 30 °C for 6 hours with stirring.

[0057] After stirr...

Embodiment 2-2， Embodiment 2-3、 comparative example 2-1

[0060]

[0061] The ratio of acetonitrile when the adjusted composition is 100% by mass is set to the ratio shown in the following Table 2, except that a composition for forming a ferrite thin film is prepared in the same manner as in Example 2-1, and a composition having CuZn ferrite films with thicknesses shown in Table 2.

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Abstract

To provide a ferrite thin film-forming composition material that is a composition material for forming a ferrite thin film by using the sol-gel method which can form a thin ferrite thin film having a uniform thickness and, furthermore, has excellent long-term storage stability, a method of forming a ferrite thin film using the above composition material, and a ferrite thin film formed by using the above method. A ferrite thin film-forming composition material is a composition material for forming a NiZn ferrite, CuZn ferrite, or NiCuZn ferrite thin film by using a sol-gel method, in which the composition material is formed by dissolving metallic raw materials in a solvent including acetonitrile, and the fraction of acetonitrile is 30 mass% to 60 mass% with respect to 100 mass% of the composition material.

Description

technical field [0001] The present invention relates to a composition for forming a ferrite thin film for forming a magnetic thin film of a thin film inductor mounted on an integrated passive device (IPD, Integrated Passive Device) chip by a sol-gel method and a method using the composition A method for forming a ferrite thin film and a ferrite thin film formed by the method. Background technique [0002] Recently, the demand for miniaturization and weight reduction of various electronic devices has increased rapidly, and miniaturization or thinning of capacitors and inductors mounted on IPD chips on which many passive devices are formed on a substrate is also required. Thinning inductors have been proposed from the conventional wound wire type with a structure of applying a winding wire to a bulk magnetic material, to the film type inductor with a structure such as a spiral planar coil sandwiched between a magnetic material such as ferrite. Wait. [0003] As magnetic mate...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/26C04B35/624
CPCC23C18/1245H01F41/24C23C18/1254C09D5/23C23C18/1283C23C18/1216H01F41/22H01F10/20C23C18/12
Inventor 土井利浩樱井英章中村贤蔵五十岚和则曽山信幸
Owner MITSUBISHI MATERIALS CORP
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