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Preparation method for ethanol gas sensor based on vanadium pentoxide multilevel nanometer network structure

A vanadium pentoxide nanometer, gas sensor technology, applied in the direction of material resistance, etc., can solve the problem that the sensitive properties of nanostructured gas-sensing materials can be fully exerted, the performance stability and reliability of gas-sensing components are affected, and the miniaturization and integration of devices are unfavorable. To avoid the secondary transfer process, improve the application scope and application field, and achieve the effect of good response-recovery characteristics

Inactive Publication Date: 2015-04-29
TIANJIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, based on the research of previous researchers, it was found that the optimum operating temperature is relatively high, usually around 200°C, which is not conducive to the research of low-power devices, and most gas-sensitive components use a secondary transfer process, that is, the temperature of the gas-sensitive material Synthesis, dispersion, and transfer to the gas sensor substrate, and finally form the gas sensor element by heat treatment, such a secondary transfer process is difficult to fully exert the sensitive performance of the nanostructured gas sensitive material, and the gas sensor formed by the secondary transfer The reliability of the electrical contact between the sensitive film and the electrode is difficult to guarantee, which affects the performance stability and reliability of the gas sensor. In addition, the complicated process is not conducive to the miniaturization and integration of the device.

Method used

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  • Preparation method for ethanol gas sensor based on vanadium pentoxide multilevel nanometer network structure
  • Preparation method for ethanol gas sensor based on vanadium pentoxide multilevel nanometer network structure
  • Preparation method for ethanol gas sensor based on vanadium pentoxide multilevel nanometer network structure

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Embodiment 1

[0037] (1) Preparation of alumina interdigital platinum electrode

[0038] The alumina sensor substrate is ultrasonically cleaned in acetone solvent, absolute ethanol, and deionized water, and then thoroughly dried, and then placed in the vacuum chamber of the ultra-high vacuum target magnetron sputtering equipment, with high-purity metallic platinum as the target. Using argon with a mass purity of 99.999% as the working gas, the sputtering working pressure is 2.0Pa, the sputtering power is 80~90W, the sputtering time is 8~10min, the substrate temperature is room temperature, and the interdigital platinum electrode is formed on the alumina surface ;

[0039] (2) Preparation of seed solution

[0040] Dissolve an appropriate amount of ammonium metavanadate in deionized water and stir magnetically until the solution turns light yellow. Add an appropriate amount of dilute nitric acid to control the pH of the solution at 2.1-2.5, forming a concentration of 0.05M-0.2M orange-red Transpar...

Embodiment 2

[0051] The difference between this embodiment and embodiment 1 is that in step (5), the concentration of ammonium metavanadate in the hydrothermal reaction solution is changed to 0.06M, and a vanadium oxide multi-level nano network gas-sensitive material is prepared. The scanning electron microscope analysis results of the surface topography are as follows image 3 As shown, there are a large number of dispersed nanoflowers, showing a porous structure, and the overlapped nanowires and nanobelts are closely linked together, and the nanoflowers are radial structures composed of nanoneedles and nanowires, and have a large specific surface area. , Can make ethanol gas "in and out" freely, so that it has higher sensitivity and faster dynamic response. Figure 5-8 It further reflects its dual working temperature for ethanol gas, as well as faster response / recovery characteristics and selection characteristics.

Embodiment 3

[0053] The difference between this embodiment and embodiment 1 is that in step (5), the concentration of ammonium metavanadate in the hydrothermal reaction solution is changed to 0.08M, and a vanadium oxide multi-level nano network gas-sensitive material is prepared. The scanning electron microscope analysis results of the surface topography are as follows Figure 4 As shown, there are spherical honeycomb-shaped nanoflowers in close contact with each other, with an average diameter of about 3-5 μm, and they also present a porous structure.

[0054] The invention uses the static gas distribution method to measure the sensitivity of the vanadium pentoxide multi-level nano network structure sensor element to ethanol gas in the temperature range of room temperature to 300°C, and defines the sensitivity of the gas sensor S=Rg / Ra, where Rg, Ra Respectively, the resistance value of the component in the detection gas and dry air.

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Abstract

The present invention discloses a preparation method for an ethanol gas sensor based on a vanadium pentoxide multilevel nanometer network structure, wherein a seed layer induction growth approach is adopted to achieve direct in-situ assembly of a multilevel vanadium oxide nanometer network structure on the surface of a sensor substrate to form a high performance vanadium oxide base ethanol gas sensor element with a double work temperature characteristic so as to avoid a secondary transfer process of a gas sensitive material, the multilevel nanometer structure formed on the substrate in the in-situ manner presents a continuous, porous and loose-like micro-structure characteristic and has a significantly high specific surface area, and reliable electric contact is formed between a gas sensitive film and an electrode. The sensor element prepared by the preparation method provides double work temperature and dual response characteristics at a room temperature and a temperature of 250 DEG C for ethanol gas, and has advantages of simple equipment, easy operation, easy process parameter control, low cost and the like.

Description

Technical field [0001] The invention relates to a gas sensor, in particular to a method for preparing a dual-working temperature ethanol gas sensor element based on a vanadium pentoxide multi-level nano network structure. Background technique [0002] With the development of modern society, safety issues have become increasingly prominent, so the requirements for reliable gas detection are getting higher and higher. In the biological, chemical, medical and food industries, ethanol gas with high sensitivity, stability, selectivity and portability is required. Sensors, which are of great significance to environmental protection and human health. Currently, many semiconductor metal oxides include SnO 2 , ZnO, TiO 2 And Fe 2 O 3 It is widely used in the detection of ethanol gas, and its sensitive mechanism belongs to the surface resistance control type. The detection of ethanol gas is based on the resistance modulation of the semiconductor material by the adsorption and reaction of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/04
Inventor 秦玉香范光涛化得燕刘凯轩孙学斌
Owner TIANJIN UNIV
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