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Method for manufacturing tungsten pipe

A manufacturing method and substrate technology, applied in the field of tungsten tubes, can solve the problems of inability to precisely control the flow of raw material gas, uneven temperature, uneven wall thickness of tungsten tubes, etc., and achieve high density, uniform wall thickness and high purity. Effect

Active Publication Date: 2013-03-20
XIAMEN TUNGSTEN +1
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Problems solved by technology

[0004] The purpose of the present invention is to provide a method to solve the phenomenon that the wall thickness of the tungsten tube is not uniform due to the inability to accurately control the flow rate of the raw material gas, the uneven temperature, and the change in the concentration of the reaction gas during the production of the pure tungsten tube by chemical vapor deposition. Manufacturing method for obtaining tungsten tube with uniform wall thickness

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  • Method for manufacturing tungsten pipe
  • Method for manufacturing tungsten pipe
  • Method for manufacturing tungsten pipe

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Embodiment Construction

[0018] see Figure 1~3 , first provide a substrate with a smooth surface, stainless steel pipe or copper pipe can be selected, with a diameter of 5-20mm, a wall thickness of 0.5-1mm, and a length figure 2 ). Under the protection of gas, start to energize and heat the substrate and gradually increase the current to 10-40A. The protective gas can be nitrogen or hydrogen, and the flow rate is controlled at 1-5L / min. The present invention uses hydrogen as the protective gas, and the flow rate is 3L / min. min, the substrate current was increased to 30A.

[0019] Then use the constant temperature gas distribution system to feed the reaction gas H 2 , the thermostatic gas distribution system (see figure 1 ) is equipped with raw material bottle 6, incubator 4, hot air blower 1, WF 6 Flow meter 7, H 2 Flow meter 5, temperature can be controlled at 30~50 ℃, and the present invention controls temperature at 40 ℃. The reaction gas is WF with a purity greater than 99.9% 6 and H with ...

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Abstract

The invention provides a method for manufacturing a tungsten pipe and relates to a tungsten pipe. The method for manufacturing the tungsten pipe with uniform wall thickness provided by the invention comprises the following steps of: 1) fixing a base material on deposition equipment, directly electrifying and heating the base material, reacting by introducing reactant gas, and increasing current until reaction is finished after reaction begins; 2) introducing protective gas into a system after the reaction is finished, and cooling to room temperature; and 3) removing the base material, so that the tungsten pipe is obtained, wherein the tungsten pipe is a pure tungsten pipe with uniform wall thickness. The phenomenon that the wall thickness of the tungsten pipe is not uniform as raw gas flow can not be accurately controlled, the temperature is not uniform and the concentrate of the reactant gas is changed in a pure tungsten pipe manufacturing process by adopting chemical vapour deposition is avoided, and the wall thickness of the manufactured tungsten pipe is uniform.

Description

technical field [0001] The invention relates to a tungsten tube, in particular to a manufacturing method of the tungsten tube. Background technique [0002] The melting point of tungsten is as high as 3410°C, which is the highest among all metals. The hardness of tungsten is greater than that of other metals, and its elastic modulus is extremely high. It has excellent electrical conductivity, good thermal conductivity, low thermal expansion coefficient and relatively stable chemical properties. Performance, tungsten and its products, based on its unique properties, have been widely used in aerospace, nuclear power, weapons, chemical industry, electric light source, electric vacuum, refractory fiber and machinery manufacturing and other industries. Tungsten tubes can be used as pipes for various ultra-high temperature gases or liquids for military or civilian use, as well as nozzles for rockets, heat-resistant sleeves for infrared lasers, pipes for special guns, ultra-high te...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/14
Inventor 陈志刚冯振雷颜彬游庄志刚孙小宝杨金洪钱文连陈财华
Owner XIAMEN TUNGSTEN
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