Nano graphical and ultrawide-band electromagnetic property measuring system
A technology of electromagnetic characteristics and nano-patterns, applied in the fields of electromagnetic field characteristics, radio-frequency circuit testing, and measuring devices, can solve the problems of difficult patterning process, cumbersome processing and measurement process, prolonging the testing time of nano-materials and devices, etc., to achieve Extensive application fields and market demands, rapid and efficient testing and research results
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[0085] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:
[0086] The invention introduces the measuring magnetic field to the sample stage with the function of SEM imaging or EBL patterning, so as to realize the test of the magnetic field response characteristic of the tested nanometer material or device. see figure 1 , figure 2 and image 3 , figure 1 It is a structural block diagram of the present invention, figure 2 It is a structural block diagram of a measuring device according to an embodiment of the present invention, image 3 It is a working principle diagram of the imaging device of the present invention. The nano-patterning and ultra-broadband electromagnetic characteristic measurement system of the present invention includes a power supply 1, a control device 2 and a measurement device 3, the control device 2 is connected to the measurement device 3, the control dev...
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