Implantable neural information dual-mode detection microelectrode array chip and manufacturing method thereof

Abstract

The invention discloses an implantable neural information dual-mode detection microelectrode array chip and a manufacturing method thereof, relating to a sensor technology. The implantable neural information dual-mode detection microelectrode array chip comprises a silicon probe base, a plurality of microelectrodes which are arranged in an array manner, a counter electrode, an electrochemical reference electrode, an electrophysiological reference electrode, leads, welding pads and an insulating layer. The implantable neural information dual-mode detection microelectrode array chip is manufactured by a microelectromechnical system (MEMS) process; the front end part of a silicon probe can be implanted into a nerve tissue in the body of an animal, is used for detecting a neuroelectrophysiological signal and a neurotransmitter electrochemical signal at the same time, and has a function of applying electrical stimulation to the nerve tissue. The implantable neural information dual-mode detection microelectrode array chip has integrated functions, and is applicable to in-situ and synchronous dual-mode detection on neural information and relevant researches after implantation into the body of the animal in emergency or for a long time.

Description

technical field [0001] The invention relates to the technical field of microprocessing of biosensors, and relates to an implanted nerve information dual-mode detection microelectrode array chip and a preparation method thereof. Background technique [0002] Nerve cells are the basic structural and functional units that make up the nervous system of higher animals. Hundreds of millions of nerve cells form intricate networks through synaptic connections. Nerve cell pulse discharge and neurotransmitter release are two modes of nerve information transmission, and the two are interdependent and mutually modulated. Therefore, the synchronous detection of nerve electrophysiological signals and neurotransmitter electrochemical signals is carried out on group nerve cells to study the interaction mechanism of nerve cells, the encoding and decoding process of neural information, the pathogenesis of neuropsychiatric diseases, and drug responses. etc., have important scientific signific...

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Problems solved by technology

[0003] For a long time, people have used traditional patch clamps, glass microelectrodes, wire microelectrodes, etc. to detect the electrophysiological signals of nerve cells in vivo or in vitro. Usually, only a few channels of data can be obtained, and Electrode positioning is difficult and the operation is cumbersome; in recent years, with the development of micro-electromechanical system (MEMS) processing technology, some micro-electrode array chips made of various materials and processes have appeared at home and abroad, which can realize the electrophysiological function of group nerve cells. Synchronous detection of activity, such as the MEA chip developed by the German Multichannel company, the Michigan implantable microelectrode array produced by the American NeuroNexus company, etc., but these electrodes have not yet integrated the function of detecting neurotransmitters, and it is impossible to deeply study the neural electrophysiological signals and corresponding neurotransmitters. However, for the detection of neurotransmitter electrochemical signals, the method of large electrodes and in vitro microdialysis is mostly used at present, which has poor real-time detection and low sensitivity, and cannot realize synchronous detection with electrophysiological signals.

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