Wrinkle type apodization waveguide Bragg grating filter and manufacturing method thereof

Abstract

The invention provides a wrinkle type apodization waveguide Bragg grating filter, comprising a substrate, a lower cladding layer, an upper cladding layer, a straight waveguide and a lower grating. The width of the lower grating is gradually increased according to a bell-shaped envelope function; the width of a grating wire located at an end part is less than the width of the straight waveguide; and the width of the grating wire located at a middle part is more than the width of the straight waveguide. The invention further provides a manufacturing method of the filter, comprising the following steps of: coating the lower cladding layer on the substrate; manufacturing an anti-etching layer; spinning negative photoresist; carrying out mask exposure; generating a structure of the lower grating through interference; developing and corroding an area of the lower grating; etching the lower grating; removing the residual negative photoresist and corroding; spinning a coating core layer material; evaporating an aluminum layer; etching the straight waveguide; developing an area outside the straight waveguide, and manufacturing the straight waveguide through corrosion; rotatably coating the upper cladding layer, and curing and drying in a vacuum manner. The filter has apodization effects with high reflectivity and high side-mode suppression ratio.

Description

technical field [0001] The invention relates to a Bragg grating filter and a preparation method thereof, in particular to a wrinkled apodized waveguide Bragg grating filter and a preparation method thereof. Background technique [0002] The waveguide grating filter is a key device in the wavelength division multiplexing system, and has been widely used in waveguide input and output couplers, beam splitters, filters, and sensors. Organic polymers have gradually become important materials in integrated optics due to their advantages such as low transmission loss, high stability and reliability, good compatibility, low cost, and easy integration. The use of organic polymer materials allows greater flexibility in device design and fabrication. [0003] The integrated waveguide Bragg grating filter mainly includes a substrate, a lower cladding layer, an upper cladding layer, a straight waveguide, and a lower grating. The lower cladding layer is fixedly connected to the upper su...

AI Technical Summary

Problems solved by technology

When the integrated waveguide Bragg grating filter is set with proper parameters, high reflectivity can be obtained, but high side lobes appear together with high reflectivity, and high Bragg grating filter side lobes will cause damage to adjacent channels in communication systems Very large crosstalk, affecting communication quality

If some apodization methods reported in the literature are used to remove the side lobes of the waveguide grating filter to improve the side-mode suppression ratio, the partial apodization method is complicated and difficult to implement, and it will suppress the main peak reflectivity while improving the side-mode suppression ratio. System requirements for high reflectivity

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