High-purity sulfuric acid production method without distillation procedure and device of high-purity sulfuric acid production method

Abstract

The invention discloses a high-purity sulfuric acid production method without a distillation procedure and a device of the high-purity sulfuric acid production method. Sulfur trioxide / sulfur dioxide gas mixture generated after primary conversion in common industrial sulfuric acid production process is delivered to a treatment column with comprehensive functions of catalytically oxidizing sulfur dioxide, washing, absorbing and filtering metal ions and solid particles and the like. In the treatment column, sulfur dioxide is converted into sulfur trioxide by the aid of catalytic liquid, solid particles and metal ions in the gas are retained by the catalytic conversion liquid, converted and purified gas enters a solid particle material filling layer, and residual sulfur dioxide, solid particles and metal ions are removed by further chemical and physical actions such as catalytic oxidation, adsorption, filtering and separation and the like. Acquired high-purity sulfur trioxide further enters an absorption column, and is absorbed by high-purity sulfuric acid in the absorption column and high-purity water which is supplemented continuously, and high-purity sulfuric acid products with quality indexes meeting GB-T625-1989 standards of guaranteed reagent or analytical reagent is generated. The high-purity sulfuric acid production method and the device thereof are applicable to implementation on the basis of the common industrial sulfuric acid production process.

Description

technical field [0001] The invention belongs to a high-purity sulfuric acid production method and its device, in particular to a kind of sulfur trioxide / sulfur dioxide mixed gas (commonly known as a suction in the industry) produced after one conversion in the ordinary industrial sulfuric acid production process as raw material. A method and device for producing high-purity sulfuric acid through processes such as catalytic oxidation, washing, adsorption, filtration and absorption. Background technique [0002] High-purity sulfuric acid is a general term for chemically pure sulfuric acid, analytically pure sulfuric acid, high-grade pure sulfuric acid and high-purity ultra-clean electronic grade sulfuric acid. High-purity sulfuric acid is used for wet cleaning and etching of semiconductor silicon wafers, as an etchant for ultra-high integrated circuits (IC) and printed circuit boards, and for electroplating and cleaning of precision-made metal components. It is one of the key ...

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Problems solved by technology

[0005] The problem to be solved by the present invention is to overcome the defects of high energy consumption and easy loss of production equipment in the existing distillation method, and provide a production process without distillation process, that is, to eliminate the impure trioxide produced after a conversion in the ordinary industrial sulfuric acid production process. Sulfur gas (containing more sulfur dioxide, particulates, metal ions and other impurities, commonly known as a gas) is subjected to catalytic oxidation, washing, adsorption, filtration and absorption processes to produce high-purity sulfuric acid

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