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Preparation method for anti-reflective glass

A technology of anti-reflection glass and silicate glass, applied in the field of anti-reflection glass, can solve the problems of low laser damage threshold, narrow anti-reflection band, limited application prospects of anti-reflection optical glass, etc. Laser damage threshold and anti-reflection wavelength controllable effect

Active Publication Date: 2012-06-13
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0002]The traditional method to reduce the reflectivity of the glass surface is to coat the glass surface with a single-layer or multi-layer anti-reflection film. There are many traditional anti-reflection methods Problems: complex preparation process, high cost, poor adhesion, poor stability, low laser damage threshold, etc., limit the application prospects of anti-reflection optical glass
At present, the method of reactive ion beam (RIE) is mainly used to process nano-sized microstructures. This method requires special reaction equipment and needs to add different reaction gases according to different materials. At the same time, parameters such as temperature, time, and flow rate are adjusted. Complex and expensive to process
And prepare anti-reflection layer on glass surface with chemical method then cost is low, simple to operate, as strong acid solution etching method (USPatent 2348704), phase separation method (US Patent 4086074), neutral solution method (US Patent 4434191; L.M.Cook, W.H.Lowdermilk, D.Milam, and J.E.Swain, Antireflective surfaces for high-energy laser optics formed by neutral-solution processing, Applied Optics, Vol.21, No.8 / 15April 1982), etc., where the strong acid method is due to the presence of fluorine in the solution Ions have certain pollution to the environment, and are easy to produce large corrosion pits on the glass surface, increasing light scattering; while the phase separation method can only be used for glasses with two different phases, and the anti-reflection band is also narrow; The neutral solution method NaHAsO adopted by L.M.Cook et al. 4 Harmful to the human body, the most important thing is that the etching speed is slow

Method used

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  • Preparation method for anti-reflective glass

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preparation example Construction

[0030] The preparation method of the anti-reflection glass of the present invention comprises the following steps:

[0031] ①Use deionized water, alkaline cleaner, and deionized water to ultrasonically clean the silicate glass substrate for 5 to 10 minutes, and place it in a clean room to dry naturally;

[0032] ② Using a nanosecond laser with a wavelength of 1064nm to perform "grid scanning" laser pretreatment on the glass surface, the energy density of the nanosecond laser with a wavelength of 1064nm ranges from 20% to 60% of the glass laser damage threshold;

[0033] ③ Immerse the laser-pretreated glass substrate in an etching solution, and perform etching treatment at a temperature of 85°C to 90°C for 10 to 40 hours;

[0034] ④ Finally, the etched glass substrate is ultrasonically cleaned with deionized water, alkaline cleaning agent, and deionized water for 5 to 10 minutes respectively, and then heated and dried to obtain anti-reflection glass.

[0035] 2. The method for...

Embodiment 1

[0039] 1. Cleaning: Use deionized water, alkaline cleaning agent, and deionized water to ultrasonically clean the silicate glass substrate for 5 to 10 minutes; dry naturally in the clean room atmosphere;

[0040] 2. Use 1064nm, 12ns laser pulses to perform "grid scanning" pretreatment on the surface of the silicate glass substrate, and the incident laser energy density at 0 degrees is 9J / cm 2 , the spot area is 0.09mm 2 , real-time monitoring of the processing process;

[0041] 3. Prepare 0.03mol / L Na 2 HPO 4 : 0.001mol / L AlCl 3 =1:1 mixed solution as etching solution;

[0042] 4. Etching: immerse the silicate glass substrate in an etching solution at a constant temperature of 85°C for 10 hours;

[0043] 5. Cleaning: Take the silicate glass substrate out of the solution, use deionized water, alkaline cleaning agent, and deionized water to ultrasonically clean the glass for 5-10 minutes, heat and dry to obtain anti-reflection glass;

[0044] 6. Spectrum measurement: The o...

Embodiment 2

[0046] 1. Cleaning: Use deionized water, alkaline cleaning agent, and deionized water to ultrasonically clean the silicate glass substrate for 5 to 10 minutes; dry naturally in the clean room atmosphere;

[0047] 2. Use 1064nm, 12ns laser pulses to perform "grid scanning" pretreatment on the surface of the silicate glass substrate, and the incident laser energy density at 0 degrees is 17J / cm 2 , the spot area is 0.09mm 2 , real-time monitoring of the processing process;

[0048] Steps 3-6 in Example 1 were repeated.

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Abstract

A preparation method for anti-reflective glass includes the steps of cleaning a silicate glass substrate, pre-treating the cleaned silicate glass substrate by means of laser, etching the pre-treated silicate glass substrate which is immersed into etching water liquor prior to cleaning, drying and the like, and obtaining the anti-reflective glass. The preparation method for the anti-reflective glass has the advantages that the technology is simple, anti-reflective effect is controllable, and glass surface subjected to laser pretreatment is not only quick and uniform in etched speed, but also capable of effectively increasing a laser induced damage threshold of the etched glass.

Description

technical field [0001] The invention relates to anti-reflection glass, in particular to a preparation method of anti-reflection glass. Background technique [0002] The traditional method to reduce the reflectivity of the glass surface is to coat the glass surface with a single-layer or multi-layer anti-reflection film. This traditional anti-reflection method has many problems: complex preparation process, high cost, poor adhesion and stability, The low laser damage threshold limits the application prospect of anti-reflection optical glass. Studies in recent decades have shown that directly etching a nanoscale porous structure on the glass surface can achieve a gradual change in refractive index from the air layer to the glass substrate, thereby effectively suppressing the reflectivity of the glass surface. At present, the method of reactive ion beam (RIE) is mainly used to process nano-sized microstructures. This method requires special reaction equipment and needs to add ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C23/00C03C15/00
Inventor 杜颖贺洪波晋云霞关贺元孔钒宇
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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