Manufacturing method for laser-damage-resistant lithium niobate triple-band antireflection film

A technology of anti-reflection film and production method, which is applied in optics, sputtering coating, nonlinear optics, etc., can solve the problems of residual reflectivity, poor spectral characteristics, large scrap of residual reflection of products, etc., and achieve the negative effects of controlling random errors Influence, improve adhesion, ensure the effect of laser damage threshold

Inactive Publication Date: 2014-09-24
SOUTH WEST INST OF TECHN PHYSICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] 2. Residual reflectivity
[0010] 2. Poor spectral characteristics
A little carelessness in the coating process may affect the balance in multiple bands, causing the product to be scrapped due to excessive residual reflection in a certain band

Method used

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  • Manufacturing method for laser-damage-resistant lithium niobate triple-band antireflection film
  • Manufacturing method for laser-damage-resistant lithium niobate triple-band antireflection film
  • Manufacturing method for laser-damage-resistant lithium niobate triple-band antireflection film

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Embodiment Construction

[0028] refer to figure 1 . According to the manufacturing method of the high damage threshold lithium niobate anti-reflection film of the present invention,

[0029] (1) Determine the theoretical film system, choose zinc sulfide ZnS as the high refractive index material, ytterbium fluoride YBF 3 It is a low refractive index material, aluminum oxide Al 2 o 3 are medium refractive index materials, define ZnS and Al respectively 2 o 3 and YBF 3 The unit optical thickness at λ / 4 is H, M and L, and the film thickness is determined according to the experimental film tensile test and laser damage test. On the computer, use the film system design software Essential Macleod to determine the initial structure of the film system according to the performance parameters required by the three-band anti-reflection; in the design of the film, the constraint conditions are lithium niobate and the first layer of YBF 3 There is a layer of Al in between 2 o 3 layer.

[0030] (2) Using ...

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Abstract

The invention brings forward a manufacturing method for a laser-damage-resistant lithium niobate triple-band antireflection film. With utilization of the method, a laser damage threshold of a lithium niobate antireflection film in an optical parametric oscillation mid-infrared laser device can be substantially enhanced, and 100 millijoule magnitude 1065nm laser can be borne so that stable work of the laser device can be guaranteed. The manufacturing method is realized via the following technical scheme: film material is selected on the basis of mid-infrared film material. ZnS is selected to act as high-refraction-index material. Low-refraction-index material is screened from CaF2, YF3 and YbF3. Reference wavelength is designed according to a film system of 1065nm. The triple-band antireflection film is designed on a computer. A full-automatic film-coating machine is utilized to manufacture a template control file used for automatic control of the film-coating machine. Quartz crystal oscillation is calibrated according to material experiment results. The selected film-coating material is arranged in the film-coating machine, and manufacturing of near-infrared and mid-infrared band triple-band antireflection films with the high laser damage threshold is automatically completed on lithium niobate according to the selected template control file.

Description

technical field [0001] The invention relates to a laser system mainly used for generating mid-infrared laser by a 1065nm optical parametric oscillation laser, which simultaneously obtains a high laser damage threshold and three wave bands of 1040-1080nm, 1400-1600nm, and 3000-4000nm on a lithium niobate crystal The invention discloses a method for making an anti-reflection film optical film with lower reflectivity. Background technique [0002] Laser has four optical properties of isotropy, high brightness, monochromaticity and high energy density. Due to its special characteristics relative to ordinary light, lasers and their application systems have played an increasingly important role in the development of modern society, and are widely used in various civil and military fields. In the optical system of the laser and its application system, in order to meet the system design requirements, the optical components that the optical path passes through in the system generall...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/11G02F1/355C23C14/06C23C14/08C23C14/54
Inventor 马孜郑环其姚德武肖琦
Owner SOUTH WEST INST OF TECHN PHYSICS
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