Thin film solar cell and formation method thereof

Abstract

The invention relates to a thin film solar cell and a formation method thereof. The thin film solar cell comprises a substrate, a photoelectric conversion unit, an anti-reflective layer, a positive electrode, and a backplate. The photoelectric conversion unit, which is arranged on the upper surface of the substrate, includes a P type semiconductor layer, an I type semiconductor layer, and an N type semiconductor layer; doped ion concentration in the P type semiconductor layer is successively increased along a direction from a position close to the I type semiconductor layer to a position far from the I type semiconductor layer; and doped ion concentration in the N type semiconductor layer is successively increased along a direction from a position close to the I type semiconductor layer to a position far from the I type semiconductor layer. Besides, the anti-reflective layer is arranged on the upper surface of the photoelectric conversion unit; the positive electrode is arranged on the upper surface of the anti-reflective layer; and the backplate is arranged on the lower surface of the substrate. According to the invention, pollution on an I type semiconductor layer by a P type semiconductor layer or an N type semiconductor layer can be reduced; and a broad band gap can be realized; therefore, photoelectric conversion efficiency is high.

Description

technical field [0001] The invention relates to the technical field of thin-film solar cells, in particular to a thin-film solar cell and a forming method thereof. Background technique [0002] Thin-film solar cells are solar cells formed by depositing very thin (several micrometers to tens of micrometers) photoelectric materials on substrates such as glass, metal or plastic. Thin-film solar cells have a series of advantages such as power generation under weak light conditions, low energy consumption in the production process, and can greatly reduce raw material and manufacturing costs. They have become a research hotspot in recent years, and their market development potential is huge. [0003] Basic thin film solar cell structure, including single P-N junction, P-I-N / N-I-P and multi-junction. A typical single-junction P-N structure includes a P-type doped layer and an N-type doped layer. Single-junction P-N junction solar cells have two structures: homojunction and hetero...

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Problems solved by technology

[0006] But there is following defect in above-mentioned technology: when the dopant ion concentration in P-type amorphous silicon layer 12 or N-type amorphous silicon layer 14 is higher, then P-type amorphous silicon layer 12 or N-type amorphous silicon layer 14 will Contaminate the I-type amorphous silicon layer 13, thereby reducing the photoelectric conversion efficiency of the thin-film solar cell; The bandgap width of the battery will also reduce the photoelectric conversion efficiency of thin-film solar cells

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