Method for depositing silicon membrane for solar cell on basis of magnetic control sputtering technology

Abstract

The invention relates to a method for depositing a silicon membrane for a solar cell on the basis of the magnetic control sputtering technology. The prepared silicon membrane is between 0.01 and 5 micrometers, and the equipment used in the method is magnetic control sputtering equipment. The method comprises the following steps of: selecting a base material, and performing pre-cleaning treatment;putting the base material on a fixture frame, and conveying the base material to a vacuum cavity of the magnetic control sputtering equipment; while keeping the linear motion of the fixture frame in the process of preparing the silicon membrane, vacuumizing the integral vacuum cavity; introducing mixed gas of argon and hydrogen continuously under a constant working air pressure; and increasing the target current of a silicon target material to 0.3 to 15 A or increasing the target power of the silicon target material to 100 to 2,000 W, and maintaining electric parameters of the silicon target material to deposit the silicon membrane for 1 to 3 minutes. In the method, toxic and dangerous gas is prevented from being introduced in the preparation process, a process is stable, safe, reliable and high in repeatability, and the prepared silicon membrane is high in deposition rate and compactness.

Description

technical field [0001] The invention belongs to the technical field of new energy material manufacturing, and in particular relates to a method for depositing silicon thin films for solar cells based on magnetron sputtering technology. Background technique [0002] Solar energy resources have become a new energy source that has attracted much attention due to their advantages such as their distribution not being restricted by regions, huge and inexhaustible reserves, and no noise in the utilization process; among various solar cells, silicon-based solar cells are rich in raw materials. , non-toxic and low cost, and compatible with semiconductor technology and other advantages are favored. [0003] At present, cell module technology represented by monocrystalline silicon solar cells and polycrystalline silicon solar cells is mature and has high conversion efficiency, but the energy and material consumption in the manufacturing process is large, and the space for cost reductio...

AI Technical Summary

Problems solved by technology

[0004] At present, when preparing silicon thin films for silicon-based thin-film solar cells, the industry uses plasma-enhanced chemical vapor deposition (PECVD) as the preparation method, and special gases such as triane (silane, borane, and phosphine) as the main raw materials. The production process The safety control is extremely strict and the process flow is relatively complicated. At the same time, the structure of the amorphous silicon thin film is not good enough, and the hydrogen content is difficult to accurately control.

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