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Micromachining method for manufacturing polymer cylindrical microlens by electric field induction

A polymer column and electric field induced technology, applied in the photoengraving process of lens and pattern surface, optics, etc., can solve the problems of difficult processing of cylindrical micro-scale molds, affecting reproduction accuracy, polymer shrinkage, etc., and achieve shortening The effect of processing time, reducing processing cost and improving production efficiency

Inactive Publication Date: 2011-11-23
XI AN JIAOTONG UNIV
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  • Summary
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Hot compression molding technology can form a large-area microlens array at one time, but the heating and cooling process will shrink the polymer and affect the accuracy of the replica
At the same time, the processing of cylindrical micro-scale molds is also very difficult, which affects the application of this technology

Method used

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  • Micromachining method for manufacturing polymer cylindrical microlens by electric field induction
  • Micromachining method for manufacturing polymer cylindrical microlens by electric field induction
  • Micromachining method for manufacturing polymer cylindrical microlens by electric field induction

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Embodiment Construction

[0023] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0024] A microfabrication method utilizing electric field induction to manufacture polymer cylindrical microlenses, comprising the following steps:

[0025] 1) The negative pattern of the conductive grid line structure is designed as a micron-scale grid line structure. According to the numerical simulation analysis, the conductive grid line structure will generate a cylindrical electric field equivalent surface in space, and the transparent surface is prepared by sputtering deposition and photolithography system. Conductive grid template, as attached figure 1 shown in SiO 2 Substrate 1 uses a photolithography process to process the negative pattern of the conductive grid line structure, and sputters a layer of transparent metal layer with a thickness of nanometers on the patterned photoresist layer with sputtering deposition equipment, and peels off the photoresist ...

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Abstract

The invention discloses a micromachining method for manufacturing a polymer cylindrical microlens by electric field induction. The method comprises the following steps of: machining on a SiO2 substrate to form a transparent conductive grid structure, spinning an SU-8 photoresist, photoetching and developing a circle of bracket to form a cylindrical electric field contour surface, and evaporating a conductive indium tin oxide (ITO) layer at the bottom of the SiO2 substrate; spinning ultraviolet curing polymer, and pressing a transparent template on the ultraviolet curing polymer to make the bracket made of the SU-8 photoresist pressed into a polymer film; making the conductive grid structure of the plane generate the cylindrical electric field contour surface on the surface of the polymer film by using a direct current power supply, and forming a cylindrical microlens structure; keeping polymer rheology under an electric field with a stabilized voltage value to form the cylindrical microlens structure; and finally, exposing the curing polymer through ultraviolet light, and removing the template to obtain a needed polymer cylindrical microlens array. The method has the advantages of high production efficiency, simple process and low cost.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a micro-processing method for manufacturing polymer cylindrical micro-lenses by using electric field induction. Background technique [0002] Lens is one of the basic optical components that constitute an optical system, and has various optical effects such as convergence, divergence, collimation, and imaging. Cylindrical lens, also known as self-focusing lens, refers to a lens with at least one refracting surface as a cylindrical surface, and the refractive index of the lens changes along the radial direction. Microlens refers to microlenses with a characteristic size of micron scale, and the array arranged in a certain shape on the substrate is called a microlens array. Cylindrical microlens arrays have the advantages of small size, light weight, and good integration, and can be used in many technical fields such as optical information processing, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00G03F7/00
Inventor 丁玉成邵金友刘红忠李欣田洪淼李祥明
Owner XI AN JIAOTONG UNIV
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