Translational grating light valve Fourier spectrometer

Abstract

The invention provides a translational grating light valve Fourier spectrometer, in which an MEMS technology, a spectrum analysis technology and a Fourier digital transform technology are used; a system comprises a light source, an imaging system, a programmable spatial light modulator array and a single detector; a wave surface from a laser wave surface to a modulator is divided, a portion of light is reflected from an upper surface while the other portion of light is reflected from a lower surface, and the two light beams are coherent light and interfere with each other; the altitude difference between the upper surface and the lower surface of the programmable spatial light modulator can be changed by electrostatic actuation, sequentially, the optical path difference of the coherent light is changed, and interference fringe modulation is implemented; the change of light energy is detected by the single detector, sample information is measured by the Fourier digital transform technology and an optical path difference correction technology; and a conventional light-splitting grating or ion beam splitter is unnecessary, a single device has the dual function of light splitting and gating, the system is simplified, and the light path is shortened, so that the spectrometer is more compact in structure and high in integrated level, and can be widely used in various production researches.

Description

technical field [0001] The invention relates to a translational grating light valve Fourier miniature spectrometer, more specifically, the invention uses the interference modulation of the translational grating light valve device to light to realize the analysis of the spectrum. Background technique [0002] In recent years, micro-electromechanical systems (MOMES) have been greatly developed, and micro-mechanical components, micro-detection elements, etc. have reduced the structure of spectroscopic instruments. Spectrometers are developing in the direction of miniaturization, high integration and portability. The miniature near-infrared spectrometer mainly uses the highly integrated micro-optical path composed of MOMES devices, combined with the chemical measurement method and the weak signal detection method to realize the measurement and detection of substances. Because of its small size, low cost, no moving parts, fast and efficient, non-destructive testing, high reliabi...

AI Technical Summary

Problems solved by technology

The technical difficulty of the grating spectrometer is that its resolution is limited by the grating and the incident slit. The improvement of the accuracy will cause a sharp decrease in the light energy, and the parallel grid grating will cause the spectrum to bend in the plane. The imaging quality of this optical system The requirements are higher than those of the Fourier spectrometer, and the measurement of the full spectrum cannot be well realized

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