In chamber sodium doping process and system for large scale fabrication of CIGS based thin film photovoltaic materials
A photovoltaic material and composite film technology, applied in photovoltaic power generation, metal material coating process, vacuum evaporation plating, etc., can solve the problems of long-term use, poor film reliability, and difficulty in mechanically integrating films with each other, and achieve simplification. Effect of doping process
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[0014] The present invention generally relates to photovoltaic materials and methods of production. More specifically, the present invention provides a method and structure for fabricating thin film solar cells. By way of example only, the present method includes indoor sodium doping based on a large-scale batch system for the production of chalcopyrite-structured thin film photovoltaic cells, but it should be recognized that the present invention may have other configurational designs.
[0015] figure 1 is a simplified flowchart illustrating a method of fabricating a thin film photovoltaic cell according to one embodiment of the present invention. This diagram is merely an example, which should not unduly limit the scope of the claims appended hereto. Method 1000 includes the following processes:
[0016] 1. Process 1010 for providing a transparent substrate covered with a first electrode layer;
[0017] 2. Process 1020 for forming copper and gallium layers covering the f...
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