Integrated magnetic electronic signal isolation coupling device and preparation process of integrated magnetic electronic signal isolation coupling device

Abstract

The invention relates to an integrated magnetic electronic signal isolation coupling device and a preparation process of the integrated magnetic electronic signal isolation coupling device. The coupling device sequentially comprises a signal processing circuit, a first insulated dielectric layer, a magnetic sensitive bridge, an insulated isolating layer, a signal input coil and a soft magnetic shielding layer from bottom to top, wherein the magnetic sensitive bridge and the signal processing circuit are electrically completely isolated from the signal input coil. The preparation process comprises the steps of preparing the magnetic sensitive bridge; preparing the insulated isolating layer and an opening; depositing a metal layer and etching to form a connecting line; taking photoresist asa template to form a copper column through a plating process; preparing the signal input coil; and adding the soft magnetic shielding layer on the signal input coil and depositing the insulated isolating layer. The coupling device has the remarkable and substantial characteristics that the coupling device is provided with the signal input coil with a double-layer structure, and an input signal current welding plate is arranged outside the coil, therefore, the overall layout of a chip is convenient, the size of the chip is reduced, and the unit current can generate strong magnetic signals whenpassing through the double-layer coil.

Description

Technical field [0001] The invention relates to an integrated magnetoelectronic signal isolation coupling device and a preparation process thereof. Background technique [0002] Isolated signal coupling devices are widely used in computer network interfaces, data transmission, communications, sensors / measuring instruments, mobile electronics, medical electronics and other fields. The basic function of the isolation signal coupling device is to communicate data signals in a state of electrical isolation. Isolation signal coupling devices can reduce or eliminate ground loop noise and common mode voltage effects and the resulting damage to the interface and auxiliary circuits. Now widely used is the photoelectric signal isolation coupling device (hereinafter referred to as photocoupler), whose operating principle is based on the emission and detection of optical signals. The optocoupler is composed of an optical signal transmitter and a detector separated by an optically tran...

AI Technical Summary

Problems solved by technology

Optocouplers have the following essential disadvantages: large size, slow speed (<10 MHz), difficult integration, no radiation protection and easy aging

However, there are three main disadvantages of this giant magnetoresistance (GMR) magnetoelectric coupling device: the first is that the device is not fully compatible with the optocoupler, and a dedicated driver is needed to convert the voltage signal into a current signal; After a power loss, the state of the output signal is indeterminate after a restart

The third is that the magnetization switching of the free layer involves domain wall motion, which not only produces Barkhausen noise, but also limits the switching speed

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