Radiation-sensitive composition, protective film and inter layer insulating film, and method for forming the same
A radiation-sensitive technology, applied in the field of protective film and interlayer insulating film, can solve problems such as peeling, insufficient adhesion of transparent conductive film, cracks in cured film, etc., and achieve cost-effective effects
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preparation example Construction
[0145]As the solvent that can be used for the preparation of the radiation-sensitive composition, a solvent that uniformly dissolves or disperses each component and does not react with each component is suitably used. Examples of such solvents include ethers, diethylene glycol alkyl ethers, ethylene glycol alkyl ether acetates, propylene glycol monoalkyl ethers, propylene glycol monoalkyl ether acetates, propylene glycol monoalkane Ether propionates, aromatic hydrocarbons, ketones, esters, etc.
[0146] Examples of these solvents include:
[0147] As ethers are, for example, tetrahydrofuran, etc.;
[0148] Examples of diethylene glycol alkyl ethers include diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol Alcohol ethyl methyl ether, etc.;
[0149] Examples of glycol alkyl ether acetates are methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl e...
Synthetic example 1
[0187]In a container with a stirrer, add 25 parts by mass of propylene glycol monomethyl ether, then add 30 parts by mass of methyltrimethoxysilane, 23 parts by mass of phenyltrimethoxysilane and 0.1 parts by mass of tetraisopropoxy aluminum , heated to a solution temperature of 60°C. After the solution temperature reached 60°C, 18 parts by mass of ion-exchanged water was added, heated to 75°C, and kept for 3 hours. Next, 28 parts by mass of methyl orthoformate was added as a dehydrating agent, and stirred for 1 hour. Then, the temperature of the solution was set at 40° C., and the solution was evaporated while maintaining the temperature to remove water and methanol produced by hydrolytic condensation. As above, the hydrolysis-condensation product (A-1) was obtained. The solid content concentration of the hydrolytic condensate (A-1) was 40.5% by mass, the number average molecular weight (Mn) of the obtained hydrolytic condensate was 1,500, and the molecular weight distribut...
Synthetic example 2
[0189] In a container with a stirrer, add 25 parts by mass of propylene glycol monomethyl ether, then add 22 parts by mass of methyltrimethoxysilane, 12 parts by mass of γ-glycidoxypropyltrimethoxysilane, 20 parts by mass of Phenyltrimethoxysilane and 0.01 parts by mass of triethylamine were used in the same manner as in Synthesis Example 1 to obtain a hydrolysis-condensation product (A-2). The solid content concentration of the hydrolytic condensate (A-2) was 39.8% by mass, the number average molecular weight (Mn) of the obtained hydrolytic condensate was 1,300, and the molecular weight distribution (Mw / Mn) was 2.2.
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