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Coating unit and pattern correcting device equipped therewith

A coating and patterning technology, which is applied to devices, coatings, and electrical components that coat liquid on the surface, can solve problems such as adverse effects on ejection stability, and achieve the effect of a simple structure

Inactive Publication Date: 2011-05-11
NTN CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Also, if the correction ink is continuously pre-sprayed (discharged) to the same position of the pre-spray table while the gap between the nozzle and the pre-spray table is narrowed, the accumulated liquid of the correction ink accumulated on the pre-spray table will be connected to the front end of the nozzle. Contact may adversely affect subsequent ejection stability

Method used

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  • Coating unit and pattern correcting device equipped therewith
  • Coating unit and pattern correcting device equipped therewith
  • Coating unit and pattern correcting device equipped therewith

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Embodiment Construction

[0157] First, correction objects of the pattern correction device including the coating unit of the present application will be described. Here, although the TFT array substrate of the liquid crystal panel as the correction target is described, the correction target is not limited thereto.

[0158] figure 1 (a) is a top view showing the main part of the TFT array substrate 1 to be corrected, figure 1 (b) is figure 1 (a) IB-IB line sectional view. exist figure 1 (a), figure 1 In (b), the TFT array substrate 1 includes a glass substrate 2 . On the surface of the glass substrate 2 are formed gate lines 3 extending in the horizontal direction in the figure, and gate electrodes 3 a protruding downward in the figure are formed at predetermined positions of the gate lines 3 . The surfaces of the gate line 3 and the gate electrode 3 a are covered with a gate insulating film 4 , and the surfaces of the gate insulating film 4 and the glass substrate 2 are covered with a gate insul...

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Abstract

The invention provides a coating unit and a pattern correcting device equipped with the coating unit, wherein the yielding of a pre-sprayed member and the decrease of a coating element are quickly performed by a simple structure.The coating unit (19) comprises a driving device (47).A pre-sprayed board (36) is inserted between a coating part (20) and a substrate (1) by the driving device (47) during the pre-spraying operation.When the pre-spraying operation is finished, the pre-sprayed board (36) yields out of the intermediate of the coating part (20) and the substrate (1).The coating unit also comprises an X table (43) (copying mechanism).The coating part (20) is lifted along with the insertion of the pre-sprayed board (36) and is lowered along with the yielding of the pre-sprayed board (36) by the X table (43).Therefore, the yielding of the pre-sprayed member and the decrease of the coating element are quickly performed by a simple structure.

Description

technical field [0001] The present invention relates to a coating unit and a pattern correction device using the coating unit, in particular to a coating unit for coating a liquid material on a microscopic area on a substrate; and correcting a defective portion of a micro pattern formed on a substrate pattern correction device. More specifically, the present invention relates to open defects (Japanese: オプンス陥) and white defects (Japanese: 白抜けま陥) of micro-patterns (wiring lines) generated in the manufacturing process of flat panel displays Or a coating unit for correcting various pattern defects such as mask defects, and a pattern correction device using the coating unit. Background technique [0002] In recent years, along with the increase in size and high definition of flat-panel displays such as liquid crystal displays, plasma displays, and EL displays, the possibility of defects in wiring (electrodes) and liquid crystal color filters formed on glass substrates has increa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C5/00B05C11/00B05C11/10G02F1/1368H01L21/00
Inventor 小池孝志
Owner NTN CORP
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