Preparation method of rare earth doped Bi2Te3 based thermoelectric film material
A thermoelectric thin film and rare earth doping technology, which is applied in the manufacture/processing of thermoelectric devices, thermoelectric device node lead-out materials, metal material coating technology, etc., can solve the difficulties of thin film materials, high production costs, complex influencing factors, etc. problem, achieve the effect of increasing carrier concentration, improving thermoelectric performance, and simple production method
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Embodiment 1
[0013] After weighing the raw materials (Bi, Te and La) according to the atomic ratio Bi1.998Te3La0.002, put them into a quartz tube, vacuum seal and place them in a heating furnace. The heating temperature is 1373K, and the heating time is 48h. During the heating process Keep the quartz tube slightly vibrated, then slowly cool down to room temperature, grind the smelted bulk alloy into powder particles with a size of 200-300 μm as the raw material for evaporation; use the flash evaporation method to realize the preparation of the film, the deposition rate is about 3nm / s, The thickness of the film is 200nm, the deposited film is annealed, the annealing temperature is 473K, the annealing time is 1h, and the rare earth doped Bi1.998Te3La0.002 thermoelectric thin film material is obtained.
Embodiment 2
[0015] After the raw materials (Bi, Te and La) are calculated and weighed according to the atomic ratio Bi1.996Te3La0.004, they are put into a quartz tube, vacuum-sealed and placed in a heating furnace. The heating temperature is 1373K, and the heating time is 48h. During the heating process Keep the quartz tube slightly vibrated, then slowly cool down to room temperature, grind the smelted bulk alloy into powder particles with a size of 200-300 μm as the raw material for evaporation; use the flash evaporation method to realize the preparation of the film, the deposition rate is about 3nm / s, The thickness of the film is 200nm, and the deposited film is annealed at a temperature of 473K and annealing time of 1h to obtain a rare earth-doped Bi1.996Te3La0.004 thermoelectric film material.
Embodiment 3
[0017] After the raw materials (Bi, Te and La) are calculated and weighed according to the atomic ratio Bi1.994Te3La0.006, they are put into a quartz tube, vacuum-sealed and placed in a heating furnace. The heating temperature is 1373K, and the heating time is 48h. During the heating process Keep the quartz tube slightly vibrated, then slowly cool down to room temperature, grind the smelted bulk alloy into powder particles with a size of 200-300 μm as the raw material for evaporation; use the flash evaporation method to realize the preparation of the film, the deposition rate is about 3nm / s, The thickness of the film is 200nm, and the deposited film is annealed at an annealing temperature of 473K and annealing time of 1h to obtain a rare earth-doped Bi1.994Te3La0.006 thermoelectric thin film material.
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