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Array waveguide light-splitting based infrared spectrum MEMS (Micro-electromechanical System) gas sensitive transducer

A gas sensor and infrared spectroscopy technology, applied in the field of gas sensors, can solve the problems of weak anti-interference ability, poor selectivity, and difficulty in miniaturization, and achieve fast response, improved linearity and precision, and good repeatability and consistency. Effect

Active Publication Date: 2010-12-22
新疆中科丝路物联科技有限公司
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Problems solved by technology

[0006] In order to solve the problems of poor selectivity, low sensitivity, weak anti-interference ability, difficult processing, and difficulty in miniaturization of existing gas sensors, the present invention provides an infrared spectrum MEMS gas sensor based on arrayed waveguide spectroscopy to meet people's needs Requirements for High Precision Gas Analysis

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  • Array waveguide light-splitting based infrared spectrum MEMS (Micro-electromechanical System) gas sensitive transducer
  • Array waveguide light-splitting based infrared spectrum MEMS (Micro-electromechanical System) gas sensitive transducer
  • Array waveguide light-splitting based infrared spectrum MEMS (Micro-electromechanical System) gas sensitive transducer

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Embodiment Construction

[0035] In order to make the purpose of the present invention, technical solutions and advantages clearer, the following in conjunction with the analysis of chloroform (chloroform) vapor in the ambient gas is a specific example, and with reference to the accompanying drawings, the present invention is further described in detail.

[0036] Such as figure 1 as shown, figure 1 It is a schematic diagram of the planar structure of the infrared spectroscopic MEMS gas sensor based on arrayed waveguide spectroscopy provided by the present invention. The sensor uses the infrared transmission spectrum of the gas for gas detection, distinguishes the gas type through the characteristic peak of the transmission spectrum, and determines the gas content by measuring the absorbance of infrared light with a characteristic wavelength. The invention effectively solves the problems of low sensitivity, limited service life and no vector detection capability of existing gas sensors, is compatible w...

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Abstract

The invention discloses an array waveguide light-splitting based infrared spectrum MEMS (Micro-electromechanical System) gas sensitive transducer. The kinds and the concentrations of gases can be determined by using an infrared transmission spectrum of the gases. The sensor comprises an infrared heat light source (1) integrated on a silicon substrate, a photonic crystal waveguide array light splitter (2), a measuring gas chamber (3), an infrared detection array (4) of the measuring gas chamber, a reference ratio gas chamber (5) and an infrared detection array (6) of the reference ratio gas chamber. The invention solves the problems that the traditional MEMS gas sensitive transducer requires a complicated process for fabrication and has a limited service life, has high-sensitivity detectivity, is compatible with the CMOS (Complementary Metal-Oxide-Semiconductor Transistor) process in the manufacture, can be produced in batch and can detect the concentration gradient of the gases in a unit array way.

Description

technical field [0001] The invention relates to a gas sensor, in particular to an infrared spectrum MEMS gas sensor based on array waveguide spectroscopy. Background technique [0002] Timely and accurate monitoring of the gas environment is an inevitable requirement for social development. Gas sensors play an important role in pharmaceutical, medical testing, food industry, petrochemical, customs, coal mine and other fields. Traditional gas sensors are large in size, high in power consumption, low in sensitivity and poor in performance consistency, inconvenient to use, and difficult to promote. MEMS-based gas sensor inherits the advantages of microelectronics technology, small size, low power consumption, good performance consistency and easy to use. [0003] However, most MEMS gas sensors based on sensitive membranes use the selective adsorption between the sensitive membrane and the target gas to cause changes in electrical parameters such as resistance and capacitance ...

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Application Information

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IPC IPC(8): G01N21/35B81B7/02G01N21/3504
Inventor 景玉鹏高超群
Owner 新疆中科丝路物联科技有限公司
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