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Capacitor MEMS (Micro-Electro-Mechanical System) microphone diaphragm

A microphone and capacitor technology, applied in the field of miniature microphones, can solve the problems of low diaphragm sensitivity, vibration and twist, and achieve the effects of improving sensitivity, releasing stress, and preventing plane twisting.

Inactive Publication Date: 2010-11-10
AAC TECH PTE LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the deficiencies of the low sensitivity of the diaphragm and the twisting of the vibration, and propose a capacitor MEMS microphone diaphragm

Method used

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  • Capacitor MEMS (Micro-Electro-Mechanical System) microphone diaphragm
  • Capacitor MEMS (Micro-Electro-Mechanical System) microphone diaphragm

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0016] The capacitive MEMS microphone of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0017] The capacitive MEMS microphone of the present invention is mainly used in mobile phones to receive sound and convert the sound into electrical signals. The present invention achieves the effect of improving the sensitivity of the capacitive microphone by changing the diaphragm structure.

[0018] The capacitive MEMS microphone diaphragm of the present invention is applied on the MEMS chip of the capacitive MEMS microphone, and the MEMS chip includes a substrate, an insulating layer connected to the substrate and a diaphragm unit 10 located in the support layer; usually, silicon material The base of the base is provided with a through hole to balance the sound pressure. The upper part of the through hole is a back plate, and the back plate is provided with an acoustic hole for conducting sound and balancing the sound pressure. T...

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Abstract

The invention relates to the field of microphones, in particular to a capacitor MEMS (Micro-Electro-Mechanical System) microphone diaphragm with sensitivity applied on electronic equipment. The capacitor MEMS microphone diaphragm comprises a diaphragm unit forming a capacitor system together with a backboard, wherein the diaphragm unit comprises an inner diaphragm piece suspended in a center position and an outer diaphragm piece, wherein the outer diaphragm piece comprises at least four pairs of uniformly distributed annular bending beams formed by outwards deviating and extending the edge of the inner diaphragm piece to reduce the restriction of an insulating layer to the edge part at the peripheral side of the diaphragm unit, thereby effectively improving the sensitivity. Meanwhile, the diaphragm unit can prevent plane torsion when the diaphragm unit shakes and effectively release the stress, thereby further improving the stability of the microphone property.

Description

【Technical field】 [0001] The invention relates to the field of miniature microphones, in particular to a more sensitive capacitive MEMS (micro-electro-mechanical system) microphone diaphragm applied to electronic equipment. 【Background technique】 [0002] With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important. The microphone of a mobile phone is used as a voice pick-up device for the mobile phone, and its design directly affects the call quality. [0003] At present, the microphone with more applications and better performance is the silicon semiconductor microphone. The silicon semiconductor microphone builds the back plate and the diaphragm on the silicon crystal, and con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R7/00H04R19/04
CPCH04R2201/003H04R19/016
Inventor 杨斌
Owner AAC TECH PTE LTD
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