Double-heterojunction MOS-HEMT component
A double heterojunction and device technology, applied in semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of obvious self-heating effect, serious gate leakage current, and excessive threshold voltage, and reduce self-heating. Heating effect, gate leakage reduction, concentration reduction effect
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[0056] The present invention simulates Al 2 o 3 / AlN / GaN / InGaN / GaN double heterojunction MOS-HEMT device electrical characteristics to demonstrate its advantages, figure 1 It is the structure diagram of the existing AlGaN / GaN / InGaN / GaN double heterojunction HEMT device, image 3 It is a structural diagram of a traditional AlGaN / GaN HEMT device. The difference of the device of the present invention is that the barrier layer is replaced by AlN, and a MOS structure is adopted. exist Figure 4 We schematically draw the conduction band energy distribution diagrams of these three devices. It can be seen that due to the reverse polarization of the InGaN layer, the existing double heterojunction HEMT device and the double heterojunction MOS- The conduction band energy of the buffer layer of the HEMT device is significantly higher than that of the traditional GaN-based HEMT device, thereby greatly reducing the leakage current of the buffer layer and the current collapse effect. Fro...
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