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Method for preparing ultralow elasticity modulus high-wearing feature shell microstructural membrane on surface of titanium

A technology with elastic modulus and high wear resistance, applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of poor medical performance and achieve the effect of simple process and wide application prospects

Inactive Publication Date: 2010-03-17
JIANGSU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that the elastic modulus of the current titanium metal surface coating is much higher than that of human bone, which leads to its poor medical performance, and to invent a method of preparing ultra-low elastic modulus and high resistance to the surface of titanium metal. Abrasive shell-type microstructure film method to meet the needs of ultra-low elastic modulus and high wear-resistant materials in biomedical and other fields

Method used

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  • Method for preparing ultralow elasticity modulus high-wearing feature shell microstructural membrane on surface of titanium
  • Method for preparing ultralow elasticity modulus high-wearing feature shell microstructural membrane on surface of titanium
  • Method for preparing ultralow elasticity modulus high-wearing feature shell microstructural membrane on surface of titanium

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Embodiment 1

[0029] A method for preparing a shell-type microstructure film with ultra-low elastic modulus and high abrasion resistance on the surface of titanium metal, comprising the following steps:

[0030] First, using titanium metal as the base material and pure magnesium as the target material, a layer of inductive pure magnesium interlayer film is evenly deposited on the surface of the cleaned titanium metal base material by using magnetron sputtering technology in a direct current manner;

[0031] Secondly, immediately after the deposition of the interlayer film, the magnetron sputtering technology is used to deposit the silicon carbide film on the interlayer film by radio frequency, and the silicon carbide film is combined with multiple shell-shaped structures of submicron scale by relying on the diffusion of magnesium. body, so that the elastic modulus of the final surface film is between 7 and 30 GPa.

[0032] The cleaning of the base material and pure magnesium refers to remov...

Embodiment 2

[0036] Such as Figure 1-8 shown.

[0037] The base material is titanium, there is a magnesium interlayer film, and the surface film is a silicon carbide film. Follow the steps described in Example 1. The background pressure when preparing magnesium film and silicon carbide film is 2.5×10 -5Pa and substrate temperature are all at room temperature, and the target-substrate distance is 70 mm. The technology used when depositing the magnesium film is the direct current (DC) magnetron sputtering technology, the target material is pure magnesium, the pressure of the working gas (argon) is 1.1Pa, the flow rate of the argon gas is 56sccm, the sputtering power is 100W, and the sputtering The time is 60 minutes. The technology used to prepare the silicon carbide film is radio frequency (RF) magnetron sputtering technology, the target material is silicon carbide, the pressure of the working gas (argon) is 2.0Pa, the flow rate of argon gas is 52sccm, and the sputtering power is 200W....

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Abstract

The invention discloses a method for preparing an ultralow elasticity modulus high-wearing feature shell microstructural membrane on the surface of titanium, which is characterized by comprising the following steps: firstly, evenly settling a layer of middle pure magnesium membrane playing the role of induction on the surface of the cleaned titanium base material in a direct current way by a magnetron sputtering technology by taking the titanium as a base material and pure magnesium as a target; secondly, promptly settling a carborundum membrane on a middle membrane in a radio-frequency way bythe magnetron sputtering technology after the settling of the middle membrane is finished and enabling the carborundum membrane to be the coalition of a plurality of shell structures of submicrons bythe diffusion effect of the magnesium so as to enable the spring modulus of the final surface membrane to be between 7 GPa and 30 GPa. The invention well solves the difficulty in preparing the membrane having ultralow elasticity modulus and high wearing feature and has simple technology procedure, thereby having wide application prospects in fields such as biology, medicine, and the like.

Description

technical field [0001] The present invention relates to a kind of preparation method of wear-resisting thin film, especially a kind of preparation method that obtains the surface thin film with special microstructure and performance by prefabricating the interlayer thin film that plays an inductive role, specifically a kind of preparation method by prefabricating magnesium ( Mg)-based interlayer film to induce the method of preparing ultra-low elastic modulus and high wear resistance shell microstructure film on the surface of titanium metal. Background technique [0002] As we all know, titanium (Ti) and other biomedical metal materials are widely used in the fields of hard tissue replacement, heart valve, vascular stent, tooth root and various orthopedic devices, but its elastic modulus is different from that of natural human bone (7~ 30GPa) has a large difference, which produces stress shielding on the bone, causing bone resorption, and its wear resistance is low, produci...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35A61L27/06A61L27/30
Inventor 许晓静郝欣妮陈丹于春航邵红红付明喜宗亮王宏宇程晓农
Owner JIANGSU UNIV
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