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Acoustic surface wave icing sensor capable of accessing wirelessly

An icing sensor and surface acoustic wave technology, applied in radio wave measurement systems, using ultrasonic/sonic/infrasonic waves, and using sonic/ultrasonic/infrasonic waves to analyze solids, etc., can solve the problem that icing sensors cannot measure wirelessly, and achieve application Convenience, low price, high sensitivity effect

Inactive Publication Date: 2010-02-10
INST OF ACOUSTICS CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a surface acoustic wave icing sensor that can be accessed wirelessly, which can overcome the shortcomings of existing icing sensors that cannot be measured wirelessly, and can detect the icing phenomenon on the surface of objects sensitively

Method used

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  • Acoustic surface wave icing sensor capable of accessing wirelessly
  • Acoustic surface wave icing sensor capable of accessing wirelessly
  • Acoustic surface wave icing sensor capable of accessing wirelessly

Examples

Experimental program
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Embodiment 1

[0026] Such as figure 1 , figure 2 As shown, the surface acoustic wave icing sensor mainly includes: a piezoelectric substrate 3 , an interdigital transducer 1 , a reflection grid 2 , an antenna 5 , a photoresist waveguide layer 4 and an encapsulation layer 6 . Through the processes of film washing, film coating, glue removal, photolithography, cleaning, etc., the dipole antenna 5, interdigital transducer 1 and reflection grid 2 are attached to the piezoelectric substrate 3 of ST900X quartz, and the center frequency is 433-500MHZ , the insertion loss of no-load passing through the antenna 5 is 15 ~ 25dB, and the SU8 2050 photoresist waveguide layer 4 is attached to the piezoelectric substrate 3 through processes such as glue rejection, pre-baking, photolithography, and post-baking, and is located at the interdigital Between the transducer 1 and the reflection grid 2, the thickness is 2-3 μm. The interdigital transducer 1, reflection grid 2, antenna 5, and piezoelectric subs...

Embodiment 2

[0028] Concrete craft making and principle are as embodiment 1, as Figure 4 , Figure 5 shown. The differences are: (1) During the process of attaching the SU82050 photoresist waveguide layer 4 to the piezoelectric substrate 3, the area of ​​the photoresist waveguide layer 4 covers the IDT 1 and the reflective grating 2; (2) A part of the SU 82050 photoresist waveguide layer 4 is exposed during packaging, and it is used as a sensitive area to effectively protect the IDT 1 and the reflection grid 2 . The encapsulation layer 6 has no effect on the emission and reception of electromagnetic waves, but the encapsulation layer 6 can effectively protect the cross-value transducer and the reflection grid, so that the sensor can be applied in a relatively complex natural environment. The structure after encapsulation is as follows Figure 6 shown.

Embodiment 3

[0030] The specific embodiment is as in Example 1, and the structure is as Figure 4 , Figure 5shown. The differences are: (1) PMMA glue is used as the waveguide layer, and the PMMA glue is attached to the piezoelectric substrate 3 to cover the interdigital transducer 1 and the reflection grid 2; (2) the piezoelectric substrate 3 uses 360 lithium tantalate.

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Abstract

The invention provides an acoustic surface wave icing sensor capable of accessing wirelessly, which is used for sensitive detection for icing phenomenon on the surface of an object. The acoustic surface wave icing sensor capable of accessing wirelessly comprises a piezoelectric substrate, a waveguide layer, an interdigital transducer, a reflecting grating and an antenna, wherein the interdigital transducer and the reflecting grating are deposited on the piezoelectric substrate and used for transmitting and receiving the acoustic surface wave through piezoelectric effect and inverse piezoelectric effect. The waveguide layer is attached to the piezoelectric substrate, and is positioned between the interdigital transducer and the reflecting grating or extended to two sides from the interdigital transducer and the reflecting grating and covers the interdigital transducer and the reflecting grating. In addition, the acoustic surface wave icing sensor also comprises an encapsulation layer for protecting the interdigital transducer, the reflecting grating, the antenna and the piezoelectric substrate. The acoustic surface wave icing sensor with the structure can access wirelessly, has small volume and high sensitivity, can be horizontally mounted, and can be produced on a large scale by integrating the antenna and a sensing chip.

Description

technical field [0001] The present invention relates to an icing sensor, in particular to a wirelessly accessible surface acoustic wave icing sensor. Background technique [0002] The document [SPIE Conference on Smart Electronics and MEMS, 1999, 3673(3): 284-291] (document 1) gave a preliminary description of the surface acoustic wave icing sensor, pointing out that the surface acoustic wave icing sensor uses the SH type SAW (Love wave) is used to be sensitive to changes in surface icing. Because Love waves are very sensitive to surface changes, they are often used in biochemical trace detection. For example, the literature [Electronics Letters, 2000, 36(19): 1672-1673] reported an experiment of detecting trace biochemical components by using a Love wave sensor plus a biosensitive membrane. Other types of surface acoustic waves also have very sensitive responses to the physical influence of the surface, so surface acoustic wave sensors also have very high sensitivity for t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01S15/04G01B17/02G01N29/04
Inventor 李红浪江城何世堂
Owner INST OF ACOUSTICS CHINESE ACAD OF SCI
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